From eenriquez at snf.stanford.edu  Mon Jan  3 15:23:27 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 3 Jan 2011 15:23:27 -0800
Subject: Comment mrc SNF 2011-01-03 15:23:27: Maintenance work
Message-ID: <mailman.665.1356282587.4282.mrc-pcs@snf.stanford.edu>

Replaced the quartz liner.  Added oil to the diffusion pump.  Modified the foreline TC gauge to minimize oil backstreaming into the gauge.  Cleaned the upper electrode.



From latta at snf.stanford.edu  Fri Jan  7 12:01:14 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 7 Jan 2011 12:01:14 -0800
Subject: Comment mrc SNF 2010-12-03 12:35:18: just tested
Message-ID: <mailman.666.1356282588.4282.mrc-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Fri Jan  7 12:01:44 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 7 Jan 2011 12:01:44 -0800
Subject: Comment mrc SNF 2010-11-22 09:21:46: Completed monthly pm
Message-ID: <mailman.667.1356282588.4282.mrc-pcs@snf.stanford.edu>

archived



From eenriquez at snf.stanford.edu  Wed Jan 19 09:39:45 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 19 Jan 2011 09:39:45 -0800
Subject: Comment mrc SNF 2011-01-03 15:23:27: Maintenance work
Message-ID: <mailman.668.1356282588.4282.mrc-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Wed Jan 19 09:40:29 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 19 Jan 2011 09:40:29 -0800
Subject: Comment mrc SNF 2010-11-18 14:15:49: Jim Mc modifications
Message-ID: <mailman.669.1356282588.4282.mrc-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Wed Jan 19 09:40:54 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 19 Jan 2011 09:40:54 -0800
Subject: Comment mrc SNF 2010-11-10 11:29:48: Maintenance work
Message-ID: <mailman.670.1356282588.4282.mrc-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Wed Jan 19 09:41:34 2011
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 19 Jan 2011 09:41:34 -0800
Subject: Comment mrc SNF 2011-01-19 09:41:34: Completed monthly PM
Message-ID: <mailman.671.1356282588.4282.mrc-pcs@snf.stanford.edu>




From jimkruger at snf.stanford.edu  Tue Jan 25 17:42:43 2011
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Tue, 25 Jan 2011 17:42:43 -0800
Subject: Comment mrc SNF 2011-01-25 17:42:42: CHF3, gas 2, flow intermitant
Message-ID: <mailman.672.1356282588.4282.mrc-pcs@snf.stanford.edu>

running 15 sccm,  in a 50 mTorr recipe, flow occasionally drops low for a few seconds.