Comment mrc SNF 2011-01-25 17:42:42: CHF3, gas 2, flow intermitant

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Tue Jan 25 17:42:43 PST 2011

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running 15 sccm,  in a 50 mTorr recipe, flow occasionally drops low for a few seconds.

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