From chongxie at snf.stanford.edu Sun Jun 5 20:19:32 2011 From: chongxie at snf.stanford.edu (chongxie at snf.stanford.edu) Date: Sun, 5 Jun 2011 20:19:32 -0700 Subject: Problem mrc SNF 2011-06-05 20:19:32: can not reach base pressure Message-ID: the gas valve was left open, and the pump switch was left at rough position, when I enable it. The pump has something wrong now. From maxms at snf.stanford.edu Sun Jun 5 22:04:59 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 5 Jun 2011 22:04:59 -0700 Subject: Problem mrc SNF 2011-06-05 22:04:58: unusable Message-ID: Not only can you not pump down to base, but when you flow gas for etching, the chamber cannot pump out the gas, so the presure rises to the point that it trips the pressure gauge... From eenriquez at snf.stanford.edu Mon Jun 6 09:51:54 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Jun 2011 09:51:54 -0700 Subject: Problem mrc SNF 2011-06-05 20:19:32: can not reach base pressure Message-ID: reset the diffusion pump over temperature switch. Ran O2 plasma for 30 min. From eenriquez at snf.stanford.edu Mon Jun 6 09:52:05 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Jun 2011 09:52:05 -0700 Subject: Problem mrc SNF 2011-06-05 22:04:58: unusable Message-ID: reset the diffusion pump over temperature switch. Ran O2 plasma for 30 min. From kcbalram at snf.stanford.edu Mon Jun 6 14:11:21 2011 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Mon, 6 Jun 2011 14:11:21 -0700 Subject: Problem mrc SNF 2011-06-06 14:11:20: Chamber coated Message-ID: The electrode head and the chamber are coated with polymer. Krishna From kcbalram at snf.stanford.edu Mon Jun 6 15:30:49 2011 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Mon, 6 Jun 2011 15:30:49 -0700 Subject: Problem mrc SNF 2011-06-06 15:30:48: CHF3 flow unstable Message-ID: CHF3 flow keeps oscillating From eenriquez at snf.stanford.edu Tue Jun 7 10:31:49 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Jun 2011 10:31:49 -0700 Subject: Problem mrc SNF 2011-06-06 15:30:48: CHF3 flow unstable Message-ID: No problem found. flowed 50 sccm CHF3 for 15 minutes with no deviations. From eenriquez at snf.stanford.edu Tue Jun 7 10:32:11 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Jun 2011 10:32:11 -0700 Subject: Problem mrc SNF 2011-06-06 14:11:20: Chamber coated Message-ID: Cleaned the top electrode. From amroy at snf.stanford.edu Tue Jun 14 20:26:14 2011 From: amroy at snf.stanford.edu (amroy at snf.stanford.edu) Date: Tue, 14 Jun 2011 20:26:14 -0700 Subject: Problem mrc SNF 2011-06-14 20:26:14: Oxygen flow not reducing to 0 Message-ID: The oxygen flow meter is continuously showing a reading of 1 sccm. The colour of Ar plasma is distinctly blue. From eenriquez at snf.stanford.edu Wed Jun 15 09:27:40 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Jun 2011 09:27:40 -0700 Subject: Problem mrc SNF 2011-06-14 20:26:14: Oxygen flow not reducing to 0 Message-ID: Zeroed the O2 MFC. From kcbalram at snf.stanford.edu Mon Jun 27 08:34:59 2011 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Mon, 27 Jun 2011 08:34:59 -0700 Subject: Shutdown mrc SNF 2011-06-27 08:34:58: Diffusion pump heater is OFF Message-ID: From eenriquez at snf.stanford.edu Mon Jun 27 09:55:48 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Jun 2011 09:55:48 -0700 Subject: Comment mrc SNF 2011-06-27 09:55:48: Update diffusion pump Message-ID: Need to replace the diffusion pump heater. Replacement heater should be here by Wednesday. From eenriquez at snf.stanford.edu Wed Jun 29 18:55:03 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Jun 2011 18:55:03 -0700 Subject: Shutdown mrc SNF 2011-06-27 08:34:58: Diffusion pump heater is OFF Message-ID: Replaced the diffusion pump heater and a burnt heater fuse. Ran O2 plasma for 5 minutes. From eenriquez at snf.stanford.edu Wed Jun 29 18:55:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Jun 2011 18:55:12 -0700 Subject: Comment mrc SNF 2011-06-27 09:55:48: Update diffusion pump Message-ID: Archived