Problem mrc SNF 2011-06-05 22:04:58: unusable

maxms at snf.stanford.edu maxms at snf.stanford.edu
Sun Jun 5 22:04:59 PDT 2011


Not only can you not pump down to base, but when you flow gas for etching, the chamber cannot pump out the gas, so the presure rises to the point that it trips the pressure gauge...




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