Problem mrc SNF 2011-06-05 22:04:58: unusable

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 6 09:52:05 PDT 2011

Previous message: Problem mrc SNF 2011-06-05 22:04:58: unusable
Next message: Problem mrc SNF 2011-06-06 14:11:20: Chamber coated
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

reset the diffusion pump over temperature switch.  Ran O2 plasma for 30 min.

Previous message: Problem mrc SNF 2011-06-05 22:04:58: unusable
Next message: Problem mrc SNF 2011-06-06 14:11:20: Chamber coated
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the mrc-pcs mailing list