Problem mrc SNF 2011-06-14 20:26:14: Oxygen flow not reducing to 0

amroy at snf.stanford.edu amroy at snf.stanford.edu
Tue Jun 14 20:26:14 PDT 2011


The oxygen flow meter is continuously showing a reading of 1 sccm. The colour of Ar plasma is distinctly blue.




More information about the mrc-pcs mailing list