From eenriquez at snf.stanford.edu Fri Mar 4 14:23:29 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Mar 2011 14:23:29 -0800 Subject: Comment mrc SNF 2011-02-16 11:06:46: Completed monthly PM Message-ID: Archived From eenriquez at snf.stanford.edu Fri Mar 4 14:36:06 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Mar 2011 14:36:06 -0800 Subject: Comment mrc SNF 2011-03-04 14:36:05: Completed monthly PM Message-ID: Replaced the quartz liner, added diffusion pump oil, cleaned the foreline TC and cleaned the chamber. From yiwu at snf.stanford.edu Sun Mar 6 14:20:24 2011 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 6 Mar 2011 14:20:24 -0800 Subject: Comment mrc SNF 2011-03-06 14:20:23: The previous use didn't close the N2 line Message-ID: The previous user forgot to close the N2 line. The chamber is at room pressure when I start to use. From luckys at snf.stanford.edu Sun Mar 13 01:18:20 2011 From: luckys at snf.stanford.edu (luckys at snf.stanford.edu) Date: Sun, 13 Mar 2011 01:18:20 -0800 Subject: Problem mrc SNF 2011-03-13 01:18:19: Plasma missing? Message-ID: I was repeating the same process for the fourth time (Ar plasma @ 100W) when suddenly the plasma stopped working. It worked fine the first three times, but I noticed it took a while for the plasma to turn on the third time. The input power shows a value...but the voltage is zero. From cbaxter at snf.stanford.edu Sun Mar 13 19:36:46 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 13 Mar 2011 19:36:46 -0700 Subject: Problem mrc SNF 2011-03-13 01:18:19: Plasma missing? Message-ID: Power off and on RF generator. Ran 10 mins O2 plasma w/out problem. From alexneu at snf.stanford.edu Wed Mar 16 17:29:10 2011 From: alexneu at snf.stanford.edu (alexneu at snf.stanford.edu) Date: Wed, 16 Mar 2011 17:29:10 -0700 Subject: Comment mrc SNF 2011-03-16 17:29:10: device left roughing with n2 flowing Message-ID: what was the previous user thinking? From macaldwe at snf.stanford.edu Fri Mar 18 10:46:59 2011 From: macaldwe at snf.stanford.edu (macaldwe at snf.stanford.edu) Date: Fri, 18 Mar 2011 10:46:59 -0700 Subject: Problem mrc SNF 2011-03-18 10:46:59: Foreline Pump Message-ID: Hi, Initially, the foreline pressure did not move, despite opening the gate valve to pump out the gas line. Roughing pressure did respond normally. After loading the sample, during the initial chamber pumping down with only the roughing pump, the pressure in the foreline pump spikes to >300 despite waiting the 10 - 15 secs for the changeo-over (when both pumps are closed). After gate valve is open, pressure drops to normal low levels and responds normally during etch. This happened for both samples. Sorry, Marissa coral login:macaldwe From macaldwe at snf.stanford.edu Fri Mar 18 10:49:19 2011 From: macaldwe at snf.stanford.edu (macaldwe at snf.stanford.edu) Date: Fri, 18 Mar 2011 10:49:19 -0700 Subject: Comment mrc SNF 2011-03-18 10:49:18: not found in proper standby conditions Message-ID: Previous user left 3 way gas valve closed (not on one of the gases), the RF power level not at 0, and the white RF switch on. From cbaxter at snf.stanford.edu Fri Mar 18 16:13:51 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 18 Mar 2011 16:13:51 -0700 Subject: Problem mrc SNF 2011-03-18 10:46:59: Foreline Pump Message-ID: Didi not any problem with the system during chamber rough down. I vented and rough down chamber a couple times and chamber rought down to 30mt with in 30sec. From eenriquez at snf.stanford.edu Mon Mar 21 09:15:49 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Mar 2011 09:15:49 -0700 Subject: Comment mrc SNF 2011-03-21 09:15:49: Pumped out O2 line Message-ID: O2 line was contaminated with N2 (pink plasma). Pumped out the gas line. From jweisse at snf.stanford.edu Tue Mar 22 12:18:20 2011 From: jweisse at snf.stanford.edu (jweisse at snf.stanford.edu) Date: Tue, 22 Mar 2011 12:18:20 -0700 Subject: Comment mrc SNF 2011-03-22 12:18:19: Pressure gauge screen Message-ID: Pressure Gauge screen was blank when showed up to use MRC From jweisse at snf.stanford.edu Tue Mar 22 12:23:55 2011 From: jweisse at snf.stanford.edu (jweisse at snf.stanford.edu) Date: Tue, 22 Mar 2011 12:23:55 -0700 Subject: Problem mrc SNF 2011-03-22 12:23:55: Pressure Gauge Screen Message-ID: Pressure Gauge Screen is blank From eenriquez at snf.stanford.edu Tue Mar 22 14:07:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Mar 2011 14:07:47 -0700 Subject: Comment mrc SNF 2011-03-22 12:18:19: Pressure gauge screen Message-ID: Somebody forgot to close the manometer isolation valve before venting the chamber. Pumped out the manometer, ran an O2 plasma. From eenriquez at snf.stanford.edu Tue Mar 22 14:07:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Mar 2011 14:07:52 -0700 Subject: Problem mrc SNF 2011-03-22 12:23:55: Pressure Gauge Screen Message-ID: Somebody forgot to close the manometer isolation valve before venting the chamber. Pumped out the manometer, ran an O2 plasma. From jweisse at snf.stanford.edu Wed Mar 23 12:24:35 2011 From: jweisse at snf.stanford.edu (jweisse at snf.stanford.edu) Date: Wed, 23 Mar 2011 12:24:35 -0700 Subject: Comment mrc SNF 2011-03-23 12:24:35: Gas Flow Gauge Calibration Message-ID: The O2 and Argon gauges reads ~0.9 and 0.7 when shut off. Also found system with the isolation valve and gas inlet toggle left open from the previous user From eenriquez at snf.stanford.edu Fri Mar 25 09:25:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Mar 2011 09:25:22 -0700 Subject: Comment mrc SNF 2011-03-23 12:24:35: Gas Flow Gauge Calibration Message-ID: Zeroed MFC#1 and MFC#3 displays From alexneu at snf.stanford.edu Sat Mar 26 07:00:40 2011 From: alexneu at snf.stanford.edu (alexneu at snf.stanford.edu) Date: Sat, 26 Mar 2011 07:00:40 -0700 Subject: Comment mrc SNF 2011-03-26 07:00:39: Foreline pressure spikes to near atmosphere upon roughing Message-ID: Happens immediately upon switching to roughing. If I switch back to foreline pumping the pressure will drop after a few seconds and I can then resume roughing and the foreline pressure won't climb very much. From mdickey at snf.stanford.edu Mon Mar 28 08:57:05 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 28 Mar 2011 08:57:05 -0700 Subject: Comment mrc SNF 2011-03-28 08:57:04: oil changed Message-ID: Cleaned sight glass and changed oil on mechanical pump From eenriquez at snf.stanford.edu Tue Mar 29 07:55:54 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Mar 2011 07:55:54 -0700 Subject: Comment mrc SNF 2011-03-26 07:00:39: Foreline pressure spikes to near atmosphere upon roughing Message-ID: Changed vacuum pump oil From eenriquez at snf.stanford.edu Tue Mar 29 07:56:04 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Mar 2011 07:56:04 -0700 Subject: Comment mrc SNF 2011-03-28 08:57:04: oil changed Message-ID: Archived