Problem mrc SNF 2011-03-18 10:46:59: Foreline Pump

macaldwe at snf.stanford.edu macaldwe at snf.stanford.edu
Fri Mar 18 10:46:59 PDT 2011


Hi,
Initially, the foreline pressure did not move, despite opening the gate valve to pump out the gas line.  Roughing pressure did respond normally. 
After loading the sample, during the initial chamber pumping down with only the roughing pump, the pressure in the foreline pump spikes to >300 despite waiting the 10 - 15 secs for the changeo-over (when both pumps are closed).  After gate valve is open, pressure drops to normal low levels and responds normally during etch.  This happened for both samples.  
Sorry,
Marissa 
coral login:macaldwe




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