From lyjiao at snf.stanford.edu Fri May 13 15:35:44 2011 From: lyjiao at snf.stanford.edu (lyjiao at snf.stanford.edu) Date: Fri, 13 May 2011 15:35:44 -0700 Subject: Problem mrc SNF 2011-05-13 15:35:44: can not generate O2 plasma Message-ID: no plasma at 40 mtorr, 20 sccm O2, high reflected power. failed to match. From alexneu at snf.stanford.edu Sun May 15 04:42:01 2011 From: alexneu at snf.stanford.edu (alexneu at snf.stanford.edu) Date: Sun, 15 May 2011 04:42:01 -0700 Subject: Problem mrc SNF 2011-05-15 04:42:01: can't generate plasma with any gas Message-ID: Experienced same problem as previous user for Ar, O2 and CHF3. Can't get plasma to spark up to 100W and 100 mTorr, with a wide range of tunings. Forward power ramps up fine, seems like an issue with the tuning system. From eenriquez at snf.stanford.edu Mon May 16 09:44:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 May 2011 09:44:19 -0700 Subject: Shutdown mrc SNF 2011-05-16 09:44:18: No plasma Message-ID: From eenriquez at snf.stanford.edu Mon May 16 14:50:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 May 2011 14:50:07 -0700 Subject: Problem mrc SNF 2011-05-13 15:35:44: can not generate O2 plasma Message-ID: Found an RF conducting strap inside the matching network shorting to ground. The strap was oriented vertically so it could not have drooped. From eenriquez at snf.stanford.edu Mon May 16 14:50:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 May 2011 14:50:12 -0700 Subject: Shutdown mrc SNF 2011-05-16 09:44:18: No plasma Message-ID: Found an RF conducting strap inside the matching network shorting to ground. The strap was oriented vertically so it could not have drooped. From eenriquez at snf.stanford.edu Mon May 16 14:50:18 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 May 2011 14:50:18 -0700 Subject: Problem mrc SNF 2011-05-15 04:42:01: can't generate plasma with any gas Message-ID: Found an RF conducting strap inside the matching network shorting to ground. The strap was oriented vertically so it could not have drooped. From eenriquez at snf.stanford.edu Mon May 16 14:52:56 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 May 2011 14:52:56 -0700 Subject: Problem mrc SNF 2011-05-16 14:52:56: TC gauges reading high Message-ID: We will replace both gauges and/ or vacuum pump tomorrow. From eenriquez at snf.stanford.edu Tue May 17 10:23:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 May 2011 10:23:47 -0700 Subject: Comment mrc SNF 2011-05-17 10:23:46: TC gauge update Message-ID: Changed vacuum pump oil but foreline pressure gauge reading remains high. We will change diffusion pump oil tomorrow. It's OK to run process because the process pressure is unaffected. From eenriquez at snf.stanford.edu Wed May 18 08:00:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 May 2011 08:00:51 -0700 Subject: Shutdown mrc SNF 2011-05-18 08:00:51: Changing difussion pump oil Message-ID: From eenriquez at snf.stanford.edu Wed May 18 19:25:46 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 May 2011 19:25:46 -0700 Subject: Shutdown mrc SNF 2011-05-18 08:00:51: Changing difussion pump oil Message-ID: Completed oil change. Foreline pressure is still high. The new oil need to out gas. Ran an O2 plasma. From eenriquez at snf.stanford.edu Wed May 25 11:46:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 May 2011 11:46:12 -0700 Subject: Comment mrc SNF 2011-05-17 10:23:46: TC gauge update Message-ID: Replaced leaky roughing valve bellows. From eenriquez at snf.stanford.edu Wed May 25 11:46:25 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 May 2011 11:46:25 -0700 Subject: Problem mrc SNF 2011-05-16 14:52:56: TC gauges reading high Message-ID: Replaced leaky roughing valve bellows. From maxms at snf.stanford.edu Sun May 29 18:00:45 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 29 May 2011 18:00:45 -0700 Subject: Problem mrc SNF 2011-05-29 18:00:45: plasma does not strike Message-ID: The plasma never turns on... I tried both oxygen and aragon. From eenriquez at snf.stanford.edu Tue May 31 10:04:55 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 May 2011 10:04:55 -0700 Subject: Problem mrc SNF 2011-05-29 18:00:45: plasma does not strike Message-ID: no problem found. Ran O2 plasma for 10 minutes with no problems.