Problem mrc SNF 2011-05-15 04:42:01: can't generate plasma with any gas

alexneu at snf.stanford.edu alexneu at snf.stanford.edu
Sun May 15 04:42:01 PDT 2011


Experienced same problem as previous user for Ar, O2 and CHF3. Can't get plasma to spark up to 100W and 100 mTorr, with a wide range of tunings. Forward power ramps up fine, seems like an issue with the tuning system.




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