Comment mrc SNF 2011-05-17 10:23:46: TC gauge update
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue May 17 10:23:47 PDT 2011
Changed vacuum pump oil but foreline pressure gauge reading remains high. We will change diffusion pump oil tomorrow.
It's OK to run process because the process pressure is unaffected.
More information about the mrc-pcs
mailing list