From cbaxter at snf.stanford.edu Wed Nov 2 16:59:43 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 2 Nov 2011 16:59:43 -0700 Subject: Shutdown mrc SNF 2011-11-02 16:59:42: Cathode Message-ID: Removing cathode assembly to be sent out for lapping and polish the top surface. From mcvittie at snf.stanford.edu Fri Nov 4 17:58:48 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 4 Nov 2011 17:58:48 -0700 Subject: Shutdown mrc SNF 2011-11-02 16:59:42: Cathode Message-ID: Could not reproduce the problem. I ran 15sccm Ar, 100w and varied the pressure from 8 to 15 mT with a bare (no wafer) electrode. I also reduced the gap back to where it had been at 7.1 cm Jim From latta at snf.stanford.edu Fri Nov 4 18:21:55 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 4 Nov 2011 18:21:55 -0700 Subject: Problem mrc SNF 2011-10-17 16:16:30: Message-ID: archived From latta at snf.stanford.edu Fri Nov 4 18:22:25 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 4 Nov 2011 18:22:25 -0700 Subject: Comment mrc SNF 2011-08-16 07:37:29: previous user turned off both valves despite HUGE sign not to Message-ID: naughty user! From latta at snf.stanford.edu Fri Nov 4 18:22:55 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 4 Nov 2011 18:22:55 -0700 Subject: Comment mrc SNF 2011-10-11 13:22:24: Finding and repairing leaks Message-ID: tons of work has occured From latta at snf.stanford.edu Fri Nov 4 18:23:30 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 4 Nov 2011 18:23:30 -0700 Subject: Comment mrc SNF 2011-10-22 14:30:58: any timeline for mrc? Message-ID: realeased From latta at snf.stanford.edu Fri Nov 4 18:23:47 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 4 Nov 2011 18:23:47 -0700 Subject: Comment mrc SNF 2011-10-22 22:43:01: Timeline Message-ID: realeased From latta at snf.stanford.edu Fri Nov 4 18:24:18 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 4 Nov 2011 18:24:18 -0700 Subject: Comment mrc SNF 2011-10-25 17:31:08: Releasing tool for recipes without burning PR Message-ID: putting as problem From latta at snf.stanford.edu Fri Nov 4 18:25:00 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 4 Nov 2011 18:25:00 -0700 Subject: Problem mrc SNF 2011-11-04 18:24:59: Use with caution.... Message-ID: Folks, After spending days on the tool tracking down low etch rates and burning resist specifically on the Ar sputter etch recipe we are now releasing the tool for general use. Please check carefully for both etch rate and reisist quality. If you can, run tests runs for your recipes to verify all is well. Please be very observant when using Ar sputter etching. Additionally, we may pre-empt your reservation to do more testing. You will probably notice there is improved cooling thanks to a new chiller and cooling coil configuration. From zguo at snf.stanford.edu Tue Nov 8 01:48:58 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Tue, 8 Nov 2011 01:48:58 -0800 Subject: Problem mrc SNF 2011-11-08 01:48:58: MRC plasma not stable Message-ID: 1) Base pressure around 1.4~1.5 mtorr, was able to reach 2) running oxygen 15sccm, ignite the plasma at around 15mtorr, when lower the pressure at around 8~10mtorr, the plasma extinguishes many times. MRC was stable for the same recipe before. From eenriquez at snf.stanford.edu Fri Nov 11 12:42:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Nov 2011 12:42:19 -0800 Subject: Problem mrc SNF 2011-11-08 01:48:58: MRC plasma not stable Message-ID: Ran O2 plasma for 20 minutes at 8 mT. Plasma was very stable. The plasma was stable until I lowered the pressure to 2 mT. From jweisse at snf.stanford.edu Sun Nov 27 11:18:47 2011 From: jweisse at snf.stanford.edu (jweisse at snf.stanford.edu) Date: Sun, 27 Nov 2011 11:18:47 -0800 Subject: Problem mrc SNF 2011-11-27 11:18:46: Chamber won't reach base pressure Message-ID: Chamber pumps down very slowly and does not reach base pressure when gate value is opened From eenriquez at snf.stanford.edu Mon Nov 28 08:47:53 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 08:47:53 -0800 Subject: Shutdown mrc SNF 2011-11-28 08:47:52: diffusion pump heater problem Message-ID: Diffusion pump heater is not heating up. From eenriquez at snf.stanford.edu Mon Nov 28 09:03:39 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 09:03:39 -0800 Subject: Shutdown mrc SNF 2011-11-28 08:47:52: diffusion pump heater problem Message-ID: Replaced burnt out diffusion pump heater fuse. Pumped down to 1x10-5 Torr and ran Ar plasma. From eenriquez at snf.stanford.edu Mon Nov 28 09:03:44 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Nov 2011 09:03:44 -0800 Subject: Problem mrc SNF 2011-11-27 11:18:46: Chamber won't reach base pressure Message-ID: Replaced burnt out diffusion pump heater fuse. Pumped down to 1x10-5 Torr and ran Ar plasma.