Shutdown mrc SNF 2011-11-02 16:59:42: Cathode

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Fri Nov 4 17:58:48 PDT 2011


Could not reproduce the problem. I  ran 15sccm Ar, 100w and varied the pressure from 8 to 15 mT with a bare (no wafer) electrode.  I also reduced the gap back to where it had been at 7.1 cm
   Jim




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