Problem mrc SNF 2011-11-08 01:48:58: MRC plasma not stable

zguo at snf.stanford.edu zguo at snf.stanford.edu
Tue Nov 8 01:48:58 PST 2011


1) Base pressure around 1.4~1.5 mtorr, was able to reach 
2) running oxygen 15sccm, ignite the plasma at around 15mtorr, when lower the pressure at around 8~10mtorr, the plasma extinguishes many times.
MRC was stable for the same recipe before.




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