Problem mrc SNF 2011-11-27 11:18:46: Chamber won't reach base pressure

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 28 09:03:44 PST 2011


Replaced burnt out diffusion pump heater fuse.  Pumped down to 1x10-5 Torr and ran Ar plasma.




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