From calarrudo at snf.stanford.edu Mon Oct 10 10:30:45 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Mon, 10 Oct 2011 10:30:45 -0700 Subject: Shutdown mrc SNF 2011-10-10 10:30:45: Suspect O2 leak Message-ID: Etch rate a has changed dramatically, suspect possible O2 leak. From eenriquez at snf.stanford.edu Tue Oct 11 13:22:25 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Oct 2011 13:22:25 -0700 Subject: Comment mrc SNF 2011-10-11 13:22:24: Finding and repairing leaks Message-ID: Found and repaired small leaks at the lid o-ring and upper electrode o-ring. Also found that the gas inlet valve is leaking. Need to replace the valve. From latta at snf.stanford.edu Wed Oct 12 18:18:15 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 12 Oct 2011 18:18:15 -0700 Subject: Shutdown mrc SNF 2011-10-10 10:30:45: Suspect O2 leak Message-ID: System leak tight- rate of rise 0.8mT/min Still tracking down the low ER issue From latta at snf.stanford.edu Wed Oct 12 18:19:06 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 12 Oct 2011 18:19:06 -0700 Subject: Problem mrc SNF 2011-10-12 18:19:06: Low etch rate reported Message-ID: Please assume that your ER's might be lower than usual. Will return to trouble shooting tomorrow.... From calarrudo at snf.stanford.edu Mon Oct 17 16:16:31 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Mon, 17 Oct 2011 16:16:31 -0700 Subject: Problem mrc SNF 2011-10-17 16:16:30: Message-ID: wafers look bad after etch. Not etching well...other piece of wafer etched Friday looked fine. From calarrudo at snf.stanford.edu Tue Oct 18 11:08:57 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 18 Oct 2011 11:08:57 -0700 Subject: Problem mrc SNF 2011-10-18 11:08:56: cooling problem Message-ID: Resist is frying black we now have a cooling problem. Wafers I etched on Friday still are not scaling which says they are under etched so we still have a leak in the system. The quarter turn gas inlet valve now turns completely around. Please also look at the vent valve for a leak. From latta at snf.stanford.edu Tue Oct 18 12:26:42 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 18 Oct 2011 12:26:42 -0700 Subject: Problem mrc SNF 2011-10-18 12:26:42: Burnt PR Message-ID: Ran Ar recipe for 10 mins and got resist burning. Btw, gas inlet toggle valve is ok- running as it was after installation, 1/2 turn. From calarrudo at snf.stanford.edu Tue Oct 18 13:56:00 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 18 Oct 2011 13:56:00 -0700 Subject: Shutdown mrc SNF 2011-10-18 13:56:00: fried resist Message-ID: Cooling does not seem to be on. From wslee at snf.stanford.edu Sat Oct 22 14:30:59 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sat, 22 Oct 2011 14:30:59 -0700 Subject: Comment mrc SNF 2011-10-22 14:30:58: any timeline for mrc? Message-ID: I am wondering when mrc will come back online. From usha at snf.stanford.edu Sat Oct 22 22:43:02 2011 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Sat, 22 Oct 2011 22:43:02 -0700 Subject: Comment mrc SNF 2011-10-22 22:43:01: Timeline Message-ID: Yes. I am also waiting for mRC to be up and would like to know. I need to get the samples etched asap. From latta at snf.stanford.edu Tue Oct 25 17:05:26 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 25 Oct 2011 17:05:26 -0700 Subject: Shutdown mrc SNF 2011-10-18 13:56:00: fried resist Message-ID: Still working on burned resist problem, but are releasing the tool for reciipes that have not exhibited the resist issues. Will put warning in problem status. From latta at snf.stanford.edu Tue Oct 25 17:06:17 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 25 Oct 2011 17:06:17 -0700 Subject: Problem mrc SNF 2011-10-18 11:08:56: cooling problem Message-ID: cooling has been adressed and gas inlet valve is fine From latta at snf.stanford.edu Tue Oct 25 17:06:35 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 25 Oct 2011 17:06:35 -0700 Subject: Problem mrc SNF 2011-10-12 18:19:06: Low etch rate reported Message-ID: still working on this From latta at snf.stanford.edu Tue Oct 25 17:07:07 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 25 Oct 2011 17:07:07 -0700 Subject: Problem mrc SNF 2011-10-18 12:26:42: Burnt PR Message-ID: adding a bit of O2 has removed PR burning. From latta at snf.stanford.edu Tue Oct 25 17:31:09 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 25 Oct 2011 17:31:09 -0700 Subject: Comment mrc SNF 2011-10-25 17:31:08: Releasing tool for recipes without burning PR Message-ID: Folks, After spending days on the tool tracking down low etch rates and burning resist specifically on the Ar sputter etch recipe we are now releasing the tool for general use. Please check carefully for both etch rate and reisist quality. If you can, run tests runs for your recipes to verify all is well. Please be very observant when using Ar sputter etching. Additionally, we may pre-empt your reservation to do more testing. You will probably notice there is improved cooling thanks to a new chiller and cooling coil configuration. From zguo at snf.stanford.edu Thu Oct 27 00:00:27 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Thu, 27 Oct 2011 00:00:27 -0700 Subject: Problem mrc SNF 2011-10-27 00:00:26: MRC base pressure is high? Message-ID: Base pressure is high, can not be below 4 mtorr. From zguo at snf.stanford.edu Thu Oct 27 00:01:09 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Thu, 27 Oct 2011 00:01:09 -0700 Subject: Problem mrc SNF 2011-10-27 00:01:09: MRC base pressure is high Message-ID: Base pressure can not be lower than 4 mtorr From zguo at snf.stanford.edu Thu Oct 27 00:11:02 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Thu, 27 Oct 2011 00:11:02 -0700 Subject: Shutdown mrc SNF 2011-10-27 00:11:02: MRC base pressure too high Message-ID: When open gate valve fully, the base pressure is around tens mtorr, the best case is around 4 mtorr. After adding 15sccm Oxygen, the pressure becomes around 88 mtorr, and can not be lower than this. so shutted down the machine. From eenriquez at snf.stanford.edu Thu Oct 27 10:56:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 27 Oct 2011 10:56:51 -0700 Subject: Comment mrc SNF 2011-10-27 10:56:50: Update base pressure Message-ID: Replaced a burnt diffusion pump heater fuse. During testing, I found that the gate valve lead screw shaft had been very badly bent. It's so bad that the gate won't even close all the way. We need to rebuild the gate valve. From cbaxter at snf.stanford.edu Thu Oct 27 19:23:25 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 27 Oct 2011 19:23:25 -0700 Subject: Comment mrc SNF 2011-10-27 19:23:24: Update Message-ID: Removed gate valve and found wafer chips on the o-ring sealing surface, cleamed o-ring and install gate valve back. Rough down chamber for 1min, swiitch toggle to foreline and vent the chamber and both vacuum gauges pressure shot up to atm the gate valve does not seal. The o-ring on the gate valve will need to be change, I remove the gate valve. From eenriquez at snf.stanford.edu Fri Oct 28 14:26:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Oct 2011 14:26:27 -0700 Subject: Problem mrc SNF 2011-10-27 00:00:26: MRC base pressure is high? Message-ID: Replaced a burnt out diffusion pump heater fuse. From eenriquez at snf.stanford.edu Fri Oct 28 14:26:34 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Oct 2011 14:26:34 -0700 Subject: Problem mrc SNF 2011-10-27 00:01:09: MRC base pressure is high Message-ID: Replaced a burnt out diffusion pump heater fuse. From eenriquez at snf.stanford.edu Fri Oct 28 14:28:09 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Oct 2011 14:28:09 -0700 Subject: Shutdown mrc SNF 2011-10-27 00:11:02: MRC base pressure too high Message-ID: Rebuilt the gate valve and straightened out the lead screw shaft. Ran O2 plasma. From eenriquez at snf.stanford.edu Fri Oct 28 14:28:16 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Oct 2011 14:28:16 -0700 Subject: Comment mrc SNF 2011-10-27 10:56:50: Update base pressure Message-ID: Archived From eenriquez at snf.stanford.edu Fri Oct 28 14:28:23 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Oct 2011 14:28:23 -0700 Subject: Comment mrc SNF 2011-10-27 19:23:24: Update Message-ID: Archived