Problem mrc SNF 2011-10-18 11:08:56: cooling problem

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Tue Oct 18 11:08:57 PDT 2011


Resist is frying black we now have a cooling problem.  Wafers I etched on Friday still are not scaling which says they are under etched so we still have a leak in the system.  The quarter turn gas inlet valve now turns completely around.  Please also look at the vent valve for a leak.




More information about the mrc-pcs mailing list