Problem mrc SNF 2011-10-18 11:08:56: cooling problem

calarrudo at calarrudo at
Tue Oct 18 11:08:57 PDT 2011

Resist is frying black we now have a cooling problem.  Wafers I etched on Friday still are not scaling which says they are under etched so we still have a leak in the system.  The quarter turn gas inlet valve now turns completely around.  Please also look at the vent valve for a leak.

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