Problem mrc SNF 2011-10-18 12:26:42: Burnt PR
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Oct 18 12:26:42 PDT 2011
Ran Ar recipe for 10 mins and got resist burning.
Btw, gas inlet toggle valve is ok- running as it was after installation, 1/2 turn.
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