Shutdown mrc SNF 2011-10-27 00:11:02: MRC base pressure too high

zguo at snf.stanford.edu zguo at snf.stanford.edu
Thu Oct 27 00:11:02 PDT 2011


When open gate valve fully, the base pressure is around tens mtorr, the best case is around 4 mtorr. After adding 15sccm Oxygen, the pressure becomes around 88 mtorr, and can not be lower than this. so shutted down the machine.




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