Problem mrc SNF 2011-09-11 15:14:52: Cannot get Foreline to 10 mTorr

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Sun Sep 11 15:14:53 PDT 2011


Having the same problem I had last week, foreline will not drop below 30 mTorr.  My last two wafers processed with the 30 mTorr had a scaling problem.  wafers were half sputter dots, half patterened and etched.
in the past sputter dots and etched halves were similar.  Cannot etch my wafers until problem is resolved.  




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