Problem mrc SNF 2011-09-20 11:42:58: Rough presure too high while etching

faridz at snf.stanford.edu faridz at snf.stanford.edu
Tue Sep 20 11:42:59 PDT 2011


CH3 fluctuating alot during etch process. Rough presure taking long time to cross over 150 mtor. 




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