From latta at snf.stanford.edu Wed Apr 4 10:35:12 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 4 Apr 2012 10:35:12 -0700 Subject: Comment mrc SNF 2012-04-04 10:35:12: Ar recipe check Message-ID: After a report of extreme etching during O2 recipe I ran a thermal oxide qual using the standard Ar recipe (Ar 15sccm, 12.5mT, 100W, 580pV, 10 mins) and got 13.7A/min etch rate. This is consistant with ER's during the resist burning study of Oct 2011. We used the Ar recipe because it is the most sensitive to leaks. Wlii the O2 recipe under observation. From latta at snf.stanford.edu Wed Apr 4 10:35:49 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 4 Apr 2012 10:35:49 -0700 Subject: Comment mrc SNF 2012-02-18 13:56:04: calibration Message-ID: archived From latta at snf.stanford.edu Wed Apr 4 10:36:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 4 Apr 2012 10:36:24 -0700 Subject: Problem mrc SNF 2012-03-29 12:10:32: oxygen etching gold Message-ID: Checked by Ar recipe, will observe From latta at snf.stanford.edu Wed Apr 4 10:36:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 4 Apr 2012 10:36:54 -0700 Subject: Comment mrc SNF 2012-02-14 10:37:40: Ar sputter etch program tested Message-ID: newer ER posted From maxms at snf.stanford.edu Sun Apr 8 09:52:47 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 8 Apr 2012 09:52:47 -0700 Subject: Problem mrc SNF 2012-04-08 09:52:47: pumping issues Message-ID: I think there is something wrong with the foreline pump. When I open the pressure gauge after pumping for a while, the pressure is still around 16mT, and dropping extremely slow - it is always at 1mT or that ballpark immidiately after opening the foreline. Also, when switching over to the foreline pump and opening the valve, you do not see the characteristic raise in pressure. lastly, then flowing oxygen, 20sccm, the valve turned 2 full rotations ALWAYS gives a pressure of 22-24mT, now however, it raises to well above 80, 90, or 100, until it trips the pressure gauge. help me, says MRC. From cbaxter at snf.stanford.edu Mon Apr 9 17:46:06 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Apr 2012 17:46:06 -0700 Subject: Comment mrc SNF 2012-04-09 17:46:05: Update Message-ID: The DP pump is cold and checked incoming power to DP heater (0 output), troubleshooting in progress.. From cbaxter at snf.stanford.edu Mon Apr 9 17:47:14 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Apr 2012 17:47:14 -0700 Subject: Shutdown mrc SNF 2012-04-09 17:47:13: DP pump is cold Message-ID: DP pump is cold and not heating up... From cbaxter at snf.stanford.edu Mon Apr 9 18:28:30 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Apr 2012 18:28:30 -0700 Subject: Comment mrc SNF 2012-04-09 18:28:30: Update Message-ID: F5 10amps time delay fuse for the DP heater is open, will ask Mike D to get a replacement fuse.. From cbaxter at snf.stanford.edu Tue Apr 10 17:02:11 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Apr 2012 17:02:11 -0700 Subject: Shutdown mrc SNF 2012-04-09 17:47:13: DP pump is cold Message-ID: DP pump at is at temp. Ran 10mins Ar plasma w/out problem. From cbaxter at snf.stanford.edu Tue Apr 10 17:02:44 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Apr 2012 17:02:44 -0700 Subject: Problem mrc SNF 2012-04-08 09:52:47: pumping issues Message-ID: Changed fuse for DP pump heater. From cbaxter at snf.stanford.edu Tue Apr 10 17:02:48 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Apr 2012 17:02:48 -0700 Subject: Comment mrc SNF 2012-04-09 18:28:30: Update Message-ID: From cbaxter at snf.stanford.edu Tue Apr 10 17:02:55 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Apr 2012 17:02:55 -0700 Subject: Comment mrc SNF 2012-04-09 17:46:05: Update Message-ID: From maxms at snf.stanford.edu Tue Apr 10 18:56:14 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Tue, 10 Apr 2012 18:56:14 -0700 Subject: Problem mrc SNF 2012-04-10 18:56:13: oxygen flow meter Message-ID: the oxygen flow meeter is going crazy - when it is off, it is reading -25sccm, though it is going all over the place, and when it is on it is ranging from 20 to 100.... From cbaxter at snf.stanford.edu Tue Apr 10 19:38:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Apr 2012 19:38:38 -0700 Subject: Problem mrc SNF 2012-04-10 18:56:13: oxygen flow meter Message-ID: From maxms at snf.stanford.edu Sun Apr 15 23:06:20 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 15 Apr 2012 23:06:20 -0700 Subject: Problem mrc SNF 2012-04-15 23:06:19: oxygen and argon meter wacky Message-ID: the argon and oxygen flow rate are wacky... when completely off, the flow still reads about .8, which is pretty high... normally, if not at 0, it is around +-.1 From eenriquez at snf.stanford.edu Mon Apr 16 07:08:25 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Apr 2012 07:08:25 -0700 Subject: Problem mrc SNF 2012-04-15 23:06:19: oxygen and argon meter wacky Message-ID: Zeroed the oxygen and argon mfc controller. From maxms at snf.stanford.edu Sat Apr 21 16:32:52 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sat, 21 Apr 2012 16:32:52 -0700 Subject: Problem mrc SNF 2012-04-21 16:32:51: CHF3 plasma will not strike... Message-ID: in general, finding it very difficult to strike the plasma today... impossible with CHF3 From cbaxter at snf.stanford.edu Sun Apr 22 19:04:12 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 Apr 2012 19:04:12 -0700 Subject: Problem mrc SNF 2012-04-21 16:32:51: CHF3 plasma will not strike... Message-ID: I ran Chf3 at 15sccm flow at 10,12 15 mt pressure and no problem tuning at 100 and 150 watts power with zero reflective. From faridz at snf.stanford.edu Tue Apr 24 12:20:52 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Tue, 24 Apr 2012 12:20:52 -0700 Subject: Problem mrc SNF 2012-04-24 12:20:51: rough pump fluctuation Message-ID: rough pump fluctuating while transaction to difusion. cant etch please check. From cbaxter at snf.stanford.edu Tue Apr 24 16:41:22 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 24 Apr 2012 16:41:22 -0700 Subject: Problem mrc SNF 2012-04-24 12:20:51: rough pump fluctuation Message-ID: The rough tc has a bad connection, secured tc signal cable with tie wrap. From luckys at snf.stanford.edu Mon Apr 30 12:54:43 2012 From: luckys at snf.stanford.edu (luckys at snf.stanford.edu) Date: Mon, 30 Apr 2012 12:54:43 -0700 Subject: Problem mrc SNF 2012-04-30 12:54:43: Argon Message-ID: Flow rate and pressure went down during process...maybe ran out of argon???!!!! From eenriquez at snf.stanford.edu Mon Apr 30 13:55:09 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Apr 2012 13:55:09 -0700 Subject: Problem mrc SNF 2012-04-30 12:54:43: Argon Message-ID: Opened the argon valve behind the system. Flowed 20 sccm Ar for 10 minutes without problems.