Problem mrc SNF 2012-04-21 16:32:51: CHF3 plasma will not strike...

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Apr 22 19:04:12 PDT 2012


I ran Chf3 at 15sccm flow at 10,12 15 mt pressure and no 
problem tuning at 100 and 150 watts power with zero reflective.




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