From eenriquez at snf.stanford.edu Wed Aug 1 19:07:26 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Aug 2012 19:07:26 -0700 Subject: Comment mrc SNF 2012-08-01 19:07:26: Update RF gen Message-ID: ENI rf generator has been installed, tested and interlocked. Need the change control board's (CCB) recommendations before we can release it. From cbaxter at snf.stanford.edu Thu Aug 2 17:46:50 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Aug 2012 17:46:50 -0700 Subject: Comment mrc SNF 2012-08-02 17:46:50: Update Message-ID: Hooked up the He leak detector and He leak checked only picked a 1/2 decade leak at the baratron ultratorr fitting. The rapid pressure rise on the foreline seem to be intermittent, when I excerise the foreline valve open/close sometime the pressure on the foreline onl;y rise to 60mt. Will continue to look for leak From eenriquez at snf.stanford.edu Fri Aug 3 07:38:28 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Aug 2012 07:38:28 -0700 Subject: Problem mrc SNF 2012-07-25 11:35:52: RF generator Message-ID: Archived. Repaired generator was still defective From eenriquez at snf.stanford.edu Fri Aug 3 07:38:55 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Aug 2012 07:38:55 -0700 Subject: Problem mrc SNF 2012-07-25 14:18:30: Still no RF Message-ID: Repaired generator was still defective. From eenriquez at snf.stanford.edu Fri Aug 3 07:39:19 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Aug 2012 07:39:19 -0700 Subject: Problem mrc SNF 2012-07-31 17:05:23: Foreline pressure burst during roughing Message-ID: Rebuilt gate valve. From eenriquez at snf.stanford.edu Fri Aug 3 07:39:40 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Aug 2012 07:39:40 -0700 Subject: Comment mrc SNF 2012-07-25 11:51:56: My Ar etch recipe works fine. Message-ID: Archived From eenriquez at snf.stanford.edu Fri Aug 3 07:40:05 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Aug 2012 07:40:05 -0700 Subject: Comment mrc SNF 2012-07-23 18:30:41: Intermittant Foreline burst during roughing Message-ID: Rebuilt the gate valve. From eenriquez at snf.stanford.edu Fri Aug 3 07:44:31 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Aug 2012 07:44:31 -0700 Subject: Comment mrc SNF 2012-08-03 07:44:31: Found chamber leaks Message-ID: User complained about higher than usual leak up rate (10 mT/min), normally it is < 4 mT/min. We found and repaired a leaky weld on the vent valve flange. Now leak rate is around 3 mT/min after an 10 min pump down. From latta at snf.stanford.edu Fri Aug 3 11:06:01 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 3 Aug 2012 11:06:01 -0700 Subject: Comment mrc SNF 2012-08-03 11:06:00: Qual after new RF generator installed Message-ID: Ar sputter etch, 10 min, 100W, 700Vp Etch rate = 18.3A/min Last ER = 17A/min @700Vp (same generator) From latta at snf.stanford.edu Fri Aug 3 18:06:47 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 3 Aug 2012 18:06:47 -0700 Subject: Shutdown mrc SNF 2012-07-25 19:18:42: RF generator is defective Message-ID: new generator installed. From latta at snf.stanford.edu Fri Aug 3 18:10:53 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 3 Aug 2012 18:10:53 -0700 Subject: Problem mrc SNF 2012-08-03 18:10:53: Temporary generator installed Message-ID: Operating instructions are posted at the tool and in the 'blue book' of operating instructions. Please read them carefully as there are safety concerns. The tool may be operated in a safe manner, but it is slightly different from the way we have been operating. Any questions should be directed to Elmer or Jim Kruger. From latta at snf.stanford.edu Fri Aug 3 18:11:18 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 3 Aug 2012 18:11:18 -0700 Subject: Comment mrc SNF 2012-07-19 10:35:16: Do not turn off the white AC switch Message-ID: archived