Comment mrc SNF 2012-07-25 11:51:56: My Ar etch recipe works fine.
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Aug 3 07:39:40 PDT 2012
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Problem mrc SNF 2012-07-31 17:05:23: Foreline pressure burst during roughing
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Comment mrc SNF 2012-07-23 18:30:41: Intermittant Foreline burst during roughing
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Problem mrc SNF 2012-07-31 17:05:23: Foreline pressure burst during roughing
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Comment mrc SNF 2012-07-23 18:30:41: Intermittant Foreline burst during roughing
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