Comment mrc SNF 2012-08-03 11:06:00: Qual after new RF generator installed

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Aug 3 11:06:01 PDT 2012

Previous message: Comment mrc SNF 2012-08-03 07:44:31: Found chamber leaks
Next message: Shutdown mrc SNF 2012-07-25 19:18:42: RF generator is defective
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Ar sputter etch, 10 min, 100W, 700Vp
Etch rate = 18.3A/min
Last ER = 17A/min @700Vp (same generator)

Previous message: Comment mrc SNF 2012-08-03 07:44:31: Found chamber leaks
Next message: Shutdown mrc SNF 2012-07-25 19:18:42: RF generator is defective
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the mrc-pcs mailing list