Comment mrc SNF 2012-08-03 11:06:00: Qual after new RF generator installed

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Aug 3 11:06:01 PDT 2012


Ar sputter etch, 10 min, 100W, 700Vp
Etch rate = 18.3A/min
Last ER = 17A/min @700Vp (same generator)




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