From booth at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 18, 2000 Subject: Shutdown mrc: broken water line reported. Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 19, 2000 Subject: Shutdown Clear mrc: repaired raptured tubing Message-ID: From mtang at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Apr 19, 2000 Subject: Shutdown mrc: Message-ID: Wups! Foreline pressure is very high (350 mtorr or more!) Is the diffusion pump down? From cbaxter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 20, 2000 Subject: Shutdown Clear mrc: heat dp, chamber base @.2M/T. introduce 25sccm of sf6 and pressure control @ 20m/t fine with +/- .2m/t deviation. Message-ID: From mtang at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Apr 22, 2000 Subject: Shutdown mrc: Message-ID: High foreline. My fault!! From cbaxter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 24, 2000 Subject: Shutdown Clear mrc: cleaned foreline t/c and top off dp pump w/fomblin oil Message-ID: From lindaw at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jul 19, 2000 Subject: Problem mrc: foreline reading seems higher than normal Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 19, 2000 Subject: Problem Clear mrc: cleaned foreline tc Message-ID: From lindaw at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Aug 3, 2000 Subject: Problem mrc: Forline P too HIGH Message-ID: The foreline pressure is resting around 200 mT. Also, the gate valve was WAY OVERTIGHTENED! by about a turn and a half. From cbaxter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 3, 2000 Subject: Problem Clear mrc: changed bad tc on foreline Message-ID: From crichter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sep 13, 2000 Subject: Problem mrc: Message-ID: RFgenerator box does not have READY indicator light on. Light bulb may need replacing. Otherwise the machine works fine. From cbaxter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 13, 2000 Subject: Problem Clear mrc: rf is ok led indicator light is dim Message-ID: From crichter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sep 26, 2000 Subject: Problem mrc: Re: mrc Message-ID: The mechanical pump red light indicator is down yet the pump works. The system power indicator lighting is also down. The RF generator READY indicator light is not lit. From cbaxter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 26, 2000 Subject: Problem Clear mrc: changed light bulbs Message-ID: From booth at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc: Chamber has high leak rate.Date: Nov 17, 2000 8:00:57 AM Message-ID: From jimkruger at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Comment mrc SNF 2012-08-06 18:09:28: MRC leak-up much improved. New RF is very good. Message-ID: <29895416.34.1344301768199.JavaMail.coral@shine> Thanks to Elmer and Cesar, leaks have been improved. In the recent past, the leak-up rate has been ~ 10 mTorr / minute. Today I got ~ 0.5 mTorr/min, 20 better. This may affect some recipes (Ar) but not likely others if O2 is part of the recipe. New RF is much better than the old, no warmup issues, seems more stable. I vote for making it permanent. From nxs4059 at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Comment mrc SNF 2012-08-10 09:58:35: Temporary Power Supply is Great Message-ID: <7911151.127.1344617915913.JavaMail.coral@shine> Used the MRC with the temporary power supply, it worked wonderfully, I second the motion to keep it (if we can rig up an interlock) From maxms at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-08-11 17:23:10: glass dirty Message-ID: <30609790.148.1344730991776.JavaMail.coral@shine> can we clean the viewing window? it is nearly impossible to see if I have an oxygen plasma, and with the new power source, i think it is extra important to be able to verify it optically as a sanity check.... From zguo at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-08-13 02:43:43: sample hot Message-ID: <30542569.6.1344851024072.JavaMail.coral@shine> Ran the same oxygen plasma etch recipe, previously the sample is just warm, but this time the sample is very hot after etch done. Is the sample cooling system working? From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-08-11 17:23:10: glass dirty Message-ID: <32886875.10.1344873394117.JavaMail.coral@shine> Replaced quartz shield From zguo at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-08-14 12:27:41: Sample stage very hot Message-ID: <21711356.40.1344972461971.JavaMail.coral@shine> Sample stage is very hot so the sample is not cooled down. The cooler shows 18 degC for the sample stage, but the sample stage itself is much hotter than 18degC, which means the temperature sensor might not working properly. From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Shutdown mrc SNF 2012-08-17 16:13:56: System not pumping Message-ID: <7108423.158.1345245237607.JavaMail.coral@shine> Diffusion pump has been dumped. Need to be cleaned. From cbaxter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Shutdown mrc SNF 2012-08-17 16:13:56: System not pumping Message-ID: <17186156.194.1345251591142.JavaMail.coral@shine> System back to normal operation.. From fpurkl at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-08-23 16:42:43: Wafer in MRC overheats Message-ID: <29696885.94.1345765364342.JavaMail.coral@shine> 2 min of the standard Argon milling recipe heats the wafer to a point where the photoresist (1.6um 3612 hardbaked and exposed to UV for 10 min) completely wrinkles. I've run 4 test etches: 2 min, standard recipe: sever wrinkling of photoresist 2 min, standard recipe + 1sccm of O2 (suggested by one user to decrease wrinkling): same sever wrinkling, higher PR etch rate 1 min standard recipe: no wrinkling 1 min, standard recipe + 1sccm of O2: no wrinkling, higher PR etch rate Etching for 2 min followed by a cooldown for 2 min has be our standard procedure for a while and it has worked without any problems up until the generator switch (possibly unrelated). From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Shutdown mrc SNF 2012-08-27 08:20:36: electrode cooling problem Message-ID: <31851494.12.1346080837193.JavaMail.coral@shine> The flowmeter is getting stuck and not indicating the actual flow. From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Shutdown mrc SNF 2012-08-27 08:20:36: electrode cooling problem Message-ID: <17029135.21.1346103738120.JavaMail.coral@shine> Found two problems. The flow indicator was stuck so that it still indicated the same flow even when the chiller was off. Also, the cooling line was completely clogged. We replaced the clogged lines and cleaned the flow indicator. From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-08-23 16:42:43: Wafer in MRC overheats Message-ID: <5965179.22.1346103849171.JavaMail.coral@shine> Found two problems. The flow indicator was stuck so that it still indicated the same flow even when the chiller was off. Also, the cooling line was completely clogged. We replaced the clogged lines and cleaned the flow indicator. User's ran test with no problems. No burnt resist on their standard etch. From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-08-14 12:27:41: Sample stage very hot Message-ID: <2324847.23.1346103855180.JavaMail.coral@shine> Found two problems. The flow indicator was stuck so that it still indicated the same flow even when the chiller was off. Also, the cooling line was completely clogged. We replaced the clogged lines and cleaned the flow indicator. User's ran test with no problems. No burnt resist on their standard etch. From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-08-13 02:43:43: sample hot Message-ID: <17926290.25.1346103861198.JavaMail.coral@shine> Found two problems. The flow indicator was stuck so that it still indicated the same flow even when the chiller was off. Also, the cooling line was completely clogged. We replaced the clogged lines and cleaned the flow indicator. User's ran test with no problems. No burnt resist on their standard etch. From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Comment mrc SNF 2012-07-23 00:52:00: Comment Message-ID: <22072196.120.1346348979564.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Comment mrc SNF 2012-08-02 17:46:50: Update Message-ID: <19061200.121.1346348991572.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Comment mrc SNF 2012-08-01 19:07:26: Update RF gen Message-ID: <12891806.122.1346348998579.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Comment mrc SNF 2012-08-03 07:44:31: Found chamber leaks Message-ID: <11107778.123.1346349011587.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Comment mrc SNF 2012-08-30 10:54:51: Replaced cooling water line Message-ID: <29547073.124.1346349291771.JavaMail.coral@shine> Replaced more of the electrode cooling water line. From latta at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-08-03 18:10:53: Temporary generator installed Message-ID: <3829652.107.1347473016530.JavaMail.coral@shine> new quick start and operating insturctions that reflect new RF generator put into place. From latta at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Comment mrc SNF 2012-09-12 11:04:01: Updated Operating Instructions Message-ID: <25313795.108.1347473041579.JavaMail.coral@shine> new quick start and operating insturctions that reflect new RF generator put into place. From latta at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-09-18 14:31:39: Ar/F22 pot freewheeling Message-ID: <15250315.26.1348003899870.JavaMail.coral@shine> It no longer stops when turning down the gas. And in general fells loose. From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-09-18 14:31:39: Ar/F22 pot freewheeling Message-ID: <12284423.31.1348067796513.JavaMail.coral@shine> Retightened potentiometer set screw From yiwu at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-09-25 21:49:32: Cannot turn on RF power Message-ID: <8174079.29.1348634972303.JavaMail.coral@shine> RF indicator is OFF all the time...couldn't turn on RF power From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-09-25 21:49:32: Cannot turn on RF power Message-ID: <4677313.30.1348670438008.JavaMail.coral@shine> No problem found. User was look at the wrong indicator. From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Comment mrc SNF 2012-06-05 10:07:30: Completed monthly PM Message-ID: <22835331.76.1349965817387.JavaMail.coral@shine> archived From jimkruger at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-10-23 17:44:25: Gate valve seal fails during roughing Message-ID: <9083775.55.1351039466477.JavaMail.coral@shine> At first, only sometimes but after 2 or 3 runs, every run. Pressure bursts high in forline about 20 or 30 seconds into roughing. Workaround is stop rough, 10 sec delay in center position, then pump foreline for a minute or 2 before going back to roughing. If you dont understand this, please don't use MRC without help (e.g. Jim Kruger or Nancy). From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-10-23 17:44:25: Gate valve seal fails during roughing Message-ID: <11186242.67.1351091696308.JavaMail.coral@shine> No problem found. Pumped and vented the chamber 5X with no problems. Foreline pressure burst during chamber rough might be caused by improperly closing the gate valve. From maxms at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-11-16 15:05:09: pressure jumps around Message-ID: <3139023.131.1353107110188.JavaMail.coral@shine> the gauge is reading the wrong pressures and jumps around. Jim McV said Ceasar can fix it - it would be great to have it seen to before tomorrow morning!!! From cbaxter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-11-16 15:05:09: pressure jumps around Message-ID: <4543404.134.1353114139022.JavaMail.coral@shine> Hooked up a external vacuum gauge on the chamber (spare port) and compared pressure with 15sccm Ar and throttle pressure to 15mt, the reading on the external vacuum is 15+\-1. The pressure reading on the tool is actually better is at 15+\-0.5mt. Showed Maxms the reading and his Ok with it. From lianglia at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: lianglia at snf.stanford.edu (lianglia at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Problem mrc SNF 2012-12-03 19:49:23: cannot turn on RF power Message-ID: <31084411.40.1354592964570.JavaMail.coral@shine> I turned the AC switch on, waited for 5min, but still cannot turn on the RF power... From cbaxter at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Shutdown mrc SNF 2012-12-03 19:57:37: No RF power.. Message-ID: <21705303.41.1354593457395.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Shutdown mrc SNF 2012-12-03 19:57:37: No RF power.. Message-ID: <7179635.13.1354662325097.JavaMail.coral@shine> The on switch (circuit breaker) is intermittent. If the power light does not turn on initially, reposition the the breaker switch until the light turns on. From eenriquez at snf.stanford.edu Sun Dec 23 09:09:41 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:09:41 -0000 Subject: Comment mrc SNF 2012-12-04 15:05:48: Intermittent ON switch Message-ID: <14191266.14.1354662349326.JavaMail.coral@shine> The on switch (circuit breaker) is intermittent. If the power light does not turn on initially, reposition the the breaker switch until the light turns on.