Shutdown mrc:
mtang at snf.stanford.edu
mtang at snf.stanford.edu
Sun Dec 23 09:09:41 PST 2012
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Problem mrc: Chamber has high leak rate.Date: Nov 17, 2000 8:00:57 AM
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Wups! Foreline pressure is very high (350 mtorr or more!) Is the diffusion pump down?
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Problem mrc: Chamber has high leak rate.Date: Nov 17, 2000 8:00:57 AM
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