Shutdown mrc:

mtang at snf.stanford.edu mtang at snf.stanford.edu
Sun Dec 23 09:09:41 PST 2012

Previous message: Shutdown mrc:
Next message: Shutdown Clear mrc: heat dp, chamber base @.2M/T. introduce 25sccm of sf6 and pressure control @ 20m/t fine with +/- .2m/t deviation.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

High foreline.  My fault!!

Previous message: Shutdown mrc:
Next message: Shutdown Clear mrc: heat dp, chamber base @.2M/T. introduce 25sccm of sf6 and pressure control @ 20m/t fine with +/- .2m/t deviation.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the mrc-pcs mailing list