Shutdown Clear mrc: cleaned foreline t/c and top off dp pump w/fomblin oil
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Sun Dec 23 09:09:41 PST 2012
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Shutdown Clear mrc: heat dp, chamber base @.2M/T. introduce 25sccm of sf6 and pressure control @ 20m/t fine with +/- .2m/t deviation.
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Problem mrc: foreline reading seems higher than normal
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Previous message:
Shutdown Clear mrc: heat dp, chamber base @.2M/T. introduce 25sccm of sf6 and pressure control @ 20m/t fine with +/- .2m/t deviation.
Next message:
Problem mrc: foreline reading seems higher than normal
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