Problem mrc SNF 2012-08-23 16:42:43: Wafer in MRC overheats

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Sun Dec 23 09:09:41 PST 2012


Found two problems.  The flow indicator was stuck so that it still indicated the same flow even when the chiller was off.  Also, the cooling line was completely clogged.  We replaced the clogged lines and cleaned the flow indicator.
User's ran test with no problems.  No burnt resist on their standard etch.



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