Problem mrc SNF 2012-08-14 12:27:41: Sample stage very hot

eenriquez at eenriquez at
Sun Dec 23 09:09:41 PST 2012

Found two problems.  The flow indicator was stuck so that it still indicated the same flow even when the chiller was off.  Also, the cooling line was completely clogged.  We replaced the clogged lines and cleaned the flow indicator.
User's ran test with no problems.  No burnt resist on their standard etch.

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