Problem mrc SNF 2012-11-16 15:05:09: pressure jumps around

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Dec 23 09:09:41 PST 2012


Hooked up a external vacuum gauge on the chamber (spare port)
and compared pressure with 15sccm Ar and throttle pressure to
15mt, the reading on the external vacuum is 15+\-1. The pressure 
reading on the tool is actually better is at 15+\-0.5mt. Showed Maxms
the reading and his Ok with it.



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