December 2012 Archives by subject

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Starting: Sun Dec 23 09:09:41 PST 2012
Ending: Sun Dec 23 09:09:41 PST 2012
Messages: 49

Comment mrc SNF 2012-06-05 10:07:30: Completed monthly PM eenriquez at snf.stanford.edu
Comment mrc SNF 2012-07-23 00:52:00: Comment eenriquez at snf.stanford.edu
Comment mrc SNF 2012-08-01 19:07:26: Update RF gen eenriquez at snf.stanford.edu
Comment mrc SNF 2012-08-02 17:46:50: Update eenriquez at snf.stanford.edu
Comment mrc SNF 2012-08-03 07:44:31: Found chamber leaks eenriquez at snf.stanford.edu
Comment mrc SNF 2012-08-06 18:09:28: MRC leak-up much improved. New RF is very good. jimkruger at snf.stanford.edu
Comment mrc SNF 2012-08-10 09:58:35: Temporary Power Supply is Great nxs4059 at snf.stanford.edu
Comment mrc SNF 2012-08-30 10:54:51: Replaced cooling water line eenriquez at snf.stanford.edu
Comment mrc SNF 2012-09-12 11:04:01: Updated Operating Instructions latta at snf.stanford.edu
Comment mrc SNF 2012-12-04 15:05:48: Intermittent ON switch eenriquez at snf.stanford.edu
Problem Clear mrc: changed bad tc on foreline cbaxter at snf.stanford.edu
Problem Clear mrc: changed light bulbs cbaxter at snf.stanford.edu
Problem Clear mrc: cleaned foreline tc cbaxter at snf.stanford.edu
Problem Clear mrc: rf is ok led indicator light is dim cbaxter at snf.stanford.edu
Problem mrc: crichter at snf.stanford.edu
Problem mrc: Chamber has high leak rate.Date: Nov 17, 2000 8:00:57 AM booth at snf.stanford.edu
Problem mrc: foreline reading seems higher than normal lindaw at snf.stanford.edu
Problem mrc: Forline P too HIGH lindaw at snf.stanford.edu
Problem mrc: Re: mrc crichter at snf.stanford.edu
Problem mrc SNF 2012-08-03 18:10:53: Temporary generator installed latta at snf.stanford.edu
Problem mrc SNF 2012-08-11 17:23:10: glass dirty maxms at snf.stanford.edu
Problem mrc SNF 2012-08-11 17:23:10: glass dirty eenriquez at snf.stanford.edu
Problem mrc SNF 2012-08-13 02:43:43: sample hot eenriquez at snf.stanford.edu
Problem mrc SNF 2012-08-13 02:43:43: sample hot zguo at snf.stanford.edu
Problem mrc SNF 2012-08-14 12:27:41: Sample stage very hot zguo at snf.stanford.edu
Problem mrc SNF 2012-08-14 12:27:41: Sample stage very hot eenriquez at snf.stanford.edu
Problem mrc SNF 2012-08-23 16:42:43: Wafer in MRC overheats fpurkl at snf.stanford.edu
Problem mrc SNF 2012-08-23 16:42:43: Wafer in MRC overheats eenriquez at snf.stanford.edu
Problem mrc SNF 2012-09-18 14:31:39: Ar/F22 pot freewheeling eenriquez at snf.stanford.edu
Problem mrc SNF 2012-09-18 14:31:39: Ar/F22 pot freewheeling latta at snf.stanford.edu
Problem mrc SNF 2012-09-25 21:49:32: Cannot turn on RF power eenriquez at snf.stanford.edu
Problem mrc SNF 2012-09-25 21:49:32: Cannot turn on RF power yiwu at snf.stanford.edu
Problem mrc SNF 2012-10-23 17:44:25: Gate valve seal fails during roughing eenriquez at snf.stanford.edu
Problem mrc SNF 2012-10-23 17:44:25: Gate valve seal fails during roughing jimkruger at snf.stanford.edu
Problem mrc SNF 2012-11-16 15:05:09: pressure jumps around maxms at snf.stanford.edu
Problem mrc SNF 2012-11-16 15:05:09: pressure jumps around cbaxter at snf.stanford.edu
Problem mrc SNF 2012-12-03 19:49:23: cannot turn on RF power lianglia at snf.stanford.edu
Shutdown Clear mrc: cleaned foreline t/c and top off dp pump w/fomblin oil cbaxter at snf.stanford.edu
Shutdown Clear mrc: heat dp, chamber base @.2M/T. introduce 25sccm of sf6 and pressure control @ 20m/t fine with +/- .2m/t deviation. cbaxter at snf.stanford.edu
Shutdown Clear mrc: repaired raptured tubing cbaxter at snf.stanford.edu
Shutdown mrc: mtang at snf.stanford.edu
Shutdown mrc: mtang at snf.stanford.edu
Shutdown mrc: broken water line reported. booth at snf.stanford.edu
Shutdown mrc SNF 2012-08-17 16:13:56: System not pumping cbaxter at snf.stanford.edu
Shutdown mrc SNF 2012-08-17 16:13:56: System not pumping eenriquez at snf.stanford.edu
Shutdown mrc SNF 2012-08-27 08:20:36: electrode cooling problem eenriquez at snf.stanford.edu
Shutdown mrc SNF 2012-08-27 08:20:36: electrode cooling problem eenriquez at snf.stanford.edu
Shutdown mrc SNF 2012-12-03 19:57:37: No RF power.. cbaxter at snf.stanford.edu
Shutdown mrc SNF 2012-12-03 19:57:37: No RF power.. eenriquez at snf.stanford.edu

Last message date: Sun Dec 23 09:09:41 PST 2012
Archived on: Sun Dec 23 09:09:51 PST 2012

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