From eenriquez at snf.stanford.edu  Tue Feb  7 12:05:21 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 7 Feb 2012 12:05:21 -0800
Subject: Shutdown mrc SNF 2011-12-14 14:11:51: Scheduled shutdown
Message-ID: <mailman.824.1356282589.4282.mrc-pcs@snf.stanford.edu>

System has been restarted.  All gases are on.



From eenriquez at snf.stanford.edu  Tue Feb  7 12:05:50 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 7 Feb 2012 12:05:50 -0800
Subject: Problem mrc SNF 2012-02-07 12:05:49: Needs process qualification
Message-ID: <mailman.825.1356282589.4282.mrc-pcs@snf.stanford.edu>

completed monthly pm.  Needs process check.



From eenriquez at snf.stanford.edu  Wed Feb  8 07:49:36 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 8 Feb 2012 07:49:36 -0800
Subject: Shutdown mrc SNF 2012-02-08 07:49:35: Facility work
Message-ID: <mailman.826.1356282589.4282.mrc-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Tue Feb 14 10:33:48 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 14 Feb 2012 10:33:48 -0800
Subject: Shutdown mrc SNF 2012-02-08 07:49:35: Facility work
Message-ID: <mailman.827.1356282589.4282.mrc-pcs@snf.stanford.edu>

work completed



From latta at snf.stanford.edu  Tue Feb 14 10:35:26 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 14 Feb 2012 10:35:26 -0800
Subject: Problem mrc SNF 2012-02-07 12:05:49: Needs process qualification
Message-ID: <mailman.828.1356282589.4282.mrc-pcs@snf.stanford.edu>

ran 10 min STD AR SPUTTER ETCH ON  oxide



From latta at snf.stanford.edu  Tue Feb 14 10:37:40 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 14 Feb 2012 10:37:40 -0800
Subject: Comment mrc SNF 2012-02-14 10:37:40: Ar sputter etch program tested
Message-ID: <mailman.829.1356282589.4282.mrc-pcs@snf.stanford.edu>

Ar 15, 100W, 600Vp, 12.5mT, 10 mins  Used SNF ring
Oxide etch rate = 24A/min
M Calarrudo will verify.



From maxms at snf.stanford.edu  Sat Feb 18 13:56:04 2012
From: maxms at snf.stanford.edu (maxms at snf.stanford.edu)
Date: Sat, 18 Feb 2012 13:56:04 -0800
Subject: Comment mrc SNF 2012-02-18 13:56:04: calibration
Message-ID: <mailman.830.1356282589.4282.mrc-pcs@snf.stanford.edu>

Hey everyone,
Just to let ppl know, I've measured pretty similar etch rates in the last few days compared to etch rates before shut-down.