Problem mrc SNF 2012-02-07 12:05:49: Needs process qualification
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Feb 14 10:35:26 PST 2012
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Problem mrc SNF 2012-02-07 12:05:49: Needs process qualification
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Shutdown mrc SNF 2012-02-08 07:49:35: Facility work
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ran 10 min STD AR SPUTTER ETCH ON oxide
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Problem mrc SNF 2012-02-07 12:05:49: Needs process qualification
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Shutdown mrc SNF 2012-02-08 07:49:35: Facility work
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