Comment mrc SNF 2012-02-14 10:37:40: Ar sputter etch program tested

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Feb 14 10:37:40 PST 2012


Ar 15, 100W, 600Vp, 12.5mT, 10 mins  Used SNF ring
Oxide etch rate = 24A/min
M Calarrudo will verify.




More information about the mrc-pcs mailing list