From cbaxter at snf.stanford.edu Sun Jul 1 20:18:58 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 1 Jul 2012 20:18:58 -0700 Subject: Problem mrc SNF 2012-06-26 14:46:00: Foreline TC gauge appears contaminated Message-ID: Removed foreline tc gauge and cleaned with ipa. From maxms at snf.stanford.edu Wed Jul 4 21:35:44 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Wed, 4 Jul 2012 21:35:44 -0700 Subject: Problem mrc SNF 2012-07-04 21:35:43: no power Message-ID: the light turns on, but no matter how far i turn knob, the power never goes above 0, and no reflected power either From eenriquez at snf.stanford.edu Thu Jul 5 07:44:18 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Jul 2012 07:44:18 -0700 Subject: Problem mrc SNF 2012-07-04 21:35:43: no power Message-ID: No problem found. Ran an Ar plasma for 10 min without any problems. From hirotsu at snf.stanford.edu Thu Jul 5 14:22:02 2012 From: hirotsu at snf.stanford.edu (hirotsu at snf.stanford.edu) Date: Thu, 5 Jul 2012 14:22:02 -0700 Subject: Comment mrc SNF 2012-07-05 14:22:01: no RF power Message-ID: no RF power From hirotsu at snf.stanford.edu Thu Jul 5 14:22:58 2012 From: hirotsu at snf.stanford.edu (hirotsu at snf.stanford.edu) Date: Thu, 5 Jul 2012 14:22:58 -0700 Subject: Problem mrc SNF 2012-07-05 14:22:58: no RF power Message-ID: no RF power From eenriquez at snf.stanford.edu Thu Jul 5 15:02:59 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Jul 2012 15:02:59 -0700 Subject: Shutdown mrc SNF 2012-07-05 15:02:58: Bad RF generator Message-ID: From gyama at snf.stanford.edu Fri Jul 6 08:00:20 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 6 Jul 2012 08:00:20 -0700 Subject: Problem mrc SNF 2012-07-06 08:00:20: update on RF generator? Message-ID: when do you estimate it will be fixed? From eenriquez at snf.stanford.edu Fri Jul 6 13:23:04 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Jul 2012 13:23:04 -0700 Subject: Comment mrc SNF 2012-07-06 13:23:04: Generator update Message-ID: The generator will be sent to for repair today. No estimate yet on how long it will take to repair. We are also exploring the possiblity of installing a more modern generator. From eenriquez at snf.stanford.edu Fri Jul 6 13:23:10 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Jul 2012 13:23:10 -0700 Subject: Problem mrc SNF 2012-07-06 08:00:20: update on RF generator? Message-ID: The generator will be sent to for repair today. No estimate yet on how long it will take to repair. We are also exploring the possiblity of installing a more modern generator. From gyama at snf.stanford.edu Tue Jul 10 10:51:18 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 10 Jul 2012 10:51:18 -0700 Subject: Problem mrc SNF 2012-07-10 10:51:18: update on fixing the old & a new one? Message-ID: From eenriquez at snf.stanford.edu Tue Jul 10 12:03:21 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Jul 2012 12:03:21 -0700 Subject: Comment mrc SNF 2012-07-10 12:03:21: Generator update Message-ID: RF generator has been repaired and should be here tomorrow. From eenriquez at snf.stanford.edu Wed Jul 11 08:10:29 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jul 2012 08:10:29 -0700 Subject: Shutdown mrc SNF 2012-07-05 15:02:58: Bad RF generator Message-ID: Installed repaired generator. Ran Ar plasma @ 200W for 10 minutes without any problems. Need to run process qual. From eenriquez at snf.stanford.edu Wed Jul 11 08:11:05 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jul 2012 08:11:05 -0700 Subject: Comment mrc SNF 2012-07-05 14:22:01: no RF power Message-ID: nstalled repaired generator. Ran Ar plasma @ 200W for 10 minutes without any problems. Need to run process qual. From eenriquez at snf.stanford.edu Wed Jul 11 08:11:10 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jul 2012 08:11:10 -0700 Subject: Problem mrc SNF 2012-07-05 14:22:58: no RF power Message-ID: nstalled repaired generator. Ran Ar plasma @ 200W for 10 minutes without any problems. Need to run process qual. From eenriquez at snf.stanford.edu Wed Jul 11 08:11:19 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jul 2012 08:11:19 -0700 Subject: Problem mrc SNF 2012-07-10 10:51:18: update on fixing the old & a new one? Message-ID: nstalled repaired generator. Ran Ar plasma @ 200W for 10 minutes without any problems. Need to run process qual. From eenriquez at snf.stanford.edu Wed Jul 11 08:11:29 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jul 2012 08:11:29 -0700 Subject: Comment mrc SNF 2012-07-06 13:23:04: Generator update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jul 11 08:11:37 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jul 2012 08:11:37 -0700 Subject: Comment mrc SNF 2012-07-10 12:03:21: Generator update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jul 11 08:12:18 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jul 2012 08:12:18 -0700 Subject: Problem mrc SNF 2012-07-11 08:12:17: Needs process qual Message-ID: Need to run a process qual after installing repaired RF generator. From latta at snf.stanford.edu Wed Jul 11 10:33:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 11 Jul 2012 10:33:54 -0700 Subject: Comment mrc SNF 2012-07-11 10:33:53: Ar qual run- after rf repair Message-ID: Ar = 15sccm, 12.5mT, 10 min. Power set to 105W, Vp = 660V, ER = 20.3A/min No quartz plate, SNF ring used. From latta at snf.stanford.edu Wed Jul 11 10:34:05 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 11 Jul 2012 10:34:05 -0700 Subject: Problem mrc SNF 2012-07-11 08:12:17: Needs process qual Message-ID: posted From kyunglok at snf.stanford.edu Fri Jul 13 00:57:03 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Fri, 13 Jul 2012 00:57:03 -0700 Subject: Problem mrc SNF 2012-07-13 00:57:02: Rough valve might not work and pressure gauge problem Message-ID: When I have run the machine about 6 hours before, it has been totally okay. However, when I tried to run the machine again, the rough gauge could not drop under 100mT. It just stayed between 1000mT and 2000mT. It might indicate the malfunction of the rough valve. Another thing I have spotted is, the pressure indicator stops working. There is no number about the pressure. I think the maintenance people should look at it. From kyunglok at snf.stanford.edu Fri Jul 13 01:31:58 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Fri, 13 Jul 2012 01:31:58 -0700 Subject: Shutdown mrc SNF 2012-07-13 01:31:58: Due to the reason I have mentioned above as a problem report Message-ID: For the quick maintenance and the notice for other users, I decided to shut the machine down. From eenriquez at snf.stanford.edu Fri Jul 13 07:38:53 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jul 2012 07:38:53 -0700 Subject: Problem mrc SNF 2012-07-13 00:57:02: Rough valve might not work and pressure gauge problem Message-ID: Rough valve and pressure gauge work fine. Vented and pumped down the system with no problems. Ran O2 plasma for 10 min. From eenriquez at snf.stanford.edu Fri Jul 13 07:38:58 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jul 2012 07:38:58 -0700 Subject: Shutdown mrc SNF 2012-07-13 01:31:58: Due to the reason I have mentioned above as a problem report Message-ID: Rough valve and pressure gauge work fine. Vented and pumped down the system with no problems. Ran O2 plasma for 10 min. From eenriquez at snf.stanford.edu Fri Jul 13 07:47:42 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jul 2012 07:47:42 -0700 Subject: Problem mrc SNF 2012-07-13 07:47:41: gate valve leak Message-ID: The gate valve has an small internal leak. It leaks only when the system is under vacuum during roughing. Since the gate valve is open during process anyway, this leak will not affect the process. From kyunglok at snf.stanford.edu Sat Jul 14 21:30:59 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sat, 14 Jul 2012 21:30:59 -0700 Subject: Problem mrc SNF 2012-07-14 21:30:59: Very unstable RF Message-ID: I found that the white AC power switch was on when I enabled this machine. It might be done by one of the previous users. And the machine produced very unstable RF when the RF power was plugged in. Most of time there was no RF. Sometimes the machine produced RF for very short time(~1min). I'm not sure but it might be related to the overrun of the AC/RF power system in the MRC. I will leave a further report about it after cooling down the machine. From kyunglok at snf.stanford.edu Sat Jul 14 22:19:00 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sat, 14 Jul 2012 22:19:00 -0700 Subject: Problem mrc SNF 2012-07-14 22:19:00: Update for the unstable RF Message-ID: Although I made machine cool down for more than 30mins, the problem could not be resolved. It produced a plasma for 2mins and the RF was gone. Next user or maintenance people might follow up this phenomenon. And please don't let the white AC switch on after disable the machine. From maxms at snf.stanford.edu Sun Jul 15 06:33:32 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 15 Jul 2012 06:33:32 -0700 Subject: Problem mrc SNF 2012-07-15 06:33:32: no power Message-ID: There is no power again to MRC...... are we gonna get a new etcher...? kinda rediculous that so many people rely on such an old tool... From maxms at snf.stanford.edu Sun Jul 15 13:14:05 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 15 Jul 2012 13:14:05 -0700 Subject: Problem mrc SNF 2012-07-15 13:14:05: diagnosis Message-ID: if you keep the white switch on, the plasma will not turn on. If you turn it on, wait like 30 seconds, then you can do the oxygen plasma okay. however, if you turn off the plasma but keep the white switch on, and a few minutes later turn on the plasma again, it won't strike. I can do multiple wafers only if when I finish the etch, I also turn off the white switch. I think the generator might be getting too hot... if you keep doing this for a few wafers, then it stops working also, and you have to leave it for like 30 minutes with the white switch off before continuing. hope this helps... From kyunglok at snf.stanford.edu Sun Jul 15 14:52:05 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sun, 15 Jul 2012 14:52:05 -0700 Subject: Problem mrc SNF 2012-07-15 14:52:04: No RF Again Message-ID: Will try to cool the machine down for 30mins. From kyunglok at snf.stanford.edu Sun Jul 15 15:22:01 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sun, 15 Jul 2012 15:22:01 -0700 Subject: Problem mrc SNF 2012-07-15 15:22:00: No RF if you use the machine for more than 2mins Message-ID: I have confirmed that the AC/RF system of the machine is out of order. If you use the machine for 2mins(or 1min) or less without O2 clean and without seasoning, that might work for this short time. However, if you'd like to use the machine for more than 2min, you may not acheive your goal. For users who will use it for a short time, I will leave it. From zguo at snf.stanford.edu Sun Jul 15 17:11:45 2012 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Sun, 15 Jul 2012 17:11:45 -0700 Subject: Problem mrc SNF 2012-07-15 17:11:44: no RF power Message-ID: From mtang at snf.stanford.edu Mon Jul 16 08:15:45 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 16 Jul 2012 08:15:45 -0700 Subject: Shutdown mrc SNF 2012-07-16 08:15:45: RF problems Message-ID: From cbaxter at snf.stanford.edu Mon Jul 16 12:12:18 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Jul 2012 12:12:18 -0700 Subject: Comment mrc SNF 2012-07-16 12:12:18: Bad RF generator Message-ID: Were sending out the RF generator for repair ( 0 output power). From mtang at snf.stanford.edu Mon Jul 16 16:24:11 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 16 Jul 2012 16:24:11 -0700 Subject: Comment mrc SNF 2012-07-16 16:24:11: Update Message-ID: The RF generator uses old style vacuum tubes and had recently returned from repair -- in which a replacement tube of unknown condition was used while a new one was on order. This temporary replacement has not unexpectedly died. Luckily, the new tube has arrived. The RF generator is being sent back to the repair service for tube replacement and calibration. It is expected back by Wednesday. From cbaxter at snf.stanford.edu Tue Jul 17 11:09:01 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:09:01 -0700 Subject: Shutdown mrc SNF 2012-07-16 08:15:45: RF problems Message-ID: Installed RF generator and test ed at 50,75, 100,125 and 150 forward power w/out problem. JMcVittie currently testing the tool with his sample device. From cbaxter at snf.stanford.edu Tue Jul 17 11:09:08 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:09:08 -0700 Subject: Problem mrc SNF 2012-07-13 07:47:41: gate valve leak Message-ID: From cbaxter at snf.stanford.edu Tue Jul 17 11:09:13 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:09:13 -0700 Subject: Problem mrc SNF 2012-07-14 21:30:59: Very unstable RF Message-ID: From cbaxter at snf.stanford.edu Tue Jul 17 11:09:16 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:09:16 -0700 Subject: Problem mrc SNF 2012-07-14 22:19:00: Update for the unstable RF Message-ID: From cbaxter at snf.stanford.edu Tue Jul 17 11:09:21 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:09:21 -0700 Subject: Problem mrc SNF 2012-07-15 06:33:32: no power Message-ID: From cbaxter at snf.stanford.edu Tue Jul 17 11:09:25 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:09:25 -0700 Subject: Problem mrc SNF 2012-07-15 13:14:05: diagnosis Message-ID: From cbaxter at snf.stanford.edu Tue Jul 17 11:09:28 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:09:28 -0700 Subject: Problem mrc SNF 2012-07-15 14:52:04: No RF Again Message-ID: From cbaxter at snf.stanford.edu Tue Jul 17 11:09:33 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:09:33 -0700 Subject: Problem mrc SNF 2012-07-15 15:22:00: No RF if you use the machine for more than 2mins Message-ID: From cbaxter at snf.stanford.edu Tue Jul 17 11:09:37 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jul 2012 11:09:37 -0700 Subject: Problem mrc SNF 2012-07-15 17:11:44: no RF power Message-ID: From maxms at snf.stanford.edu Tue Jul 17 14:23:47 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Tue, 17 Jul 2012 14:23:47 -0700 Subject: Shutdown mrc SNF 2012-07-17 14:23:46: no power Message-ID: still no power... :( From latta at snf.stanford.edu Wed Jul 18 10:36:34 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jul 2012 10:36:34 -0700 Subject: Problem mrc SNF 2012-07-18 10:36:33: RF still not working Message-ID: Attempted to run the std Ar recipe and was able to get the RF on with very high reflected pwr for a couple of short periods of time, 10 secs. Tried to run an O2 recipe and got nothing from the RF at all. From latta at snf.stanford.edu Wed Jul 18 12:54:10 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jul 2012 12:54:10 -0700 Subject: Comment mrc SNF 2012-07-18 12:54:10: pyrex shield close to needing cleaning Message-ID: From mdickey at snf.stanford.edu Thu Jul 19 08:54:19 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 19 Jul 2012 08:54:19 -0700 Subject: Shutdown mrc SNF 2012-07-17 14:23:46: no power Message-ID: Ran at 50, 100 and 150 watts for 20 minutes with no problem. Need to always leave the AC power on. Leaving it off causes problems. Needs time to warm up From mdickey at snf.stanford.edu Thu Jul 19 09:27:15 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 19 Jul 2012 09:27:15 -0700 Subject: Shutdown mrc SNF 2012-07-19 09:27:15: test Message-ID: Machine needs testing From latta at snf.stanford.edu Thu Jul 19 10:32:26 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2012 10:32:26 -0700 Subject: Comment mrc SNF 2012-07-19 10:32:25: Ar test after RF repair Message-ID: Ar = 15sccm, 12.5mT, 10 min. Power set to 103W, Vp = 660V, ER = 23.2A/min No quartz plate, SNF ring used. From latta at snf.stanford.edu Thu Jul 19 10:32:46 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2012 10:32:46 -0700 Subject: Shutdown mrc SNF 2012-07-19 09:27:15: test Message-ID: test completed and posted on coral From latta at snf.stanford.edu Thu Jul 19 10:33:20 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2012 10:33:20 -0700 Subject: Problem mrc SNF 2012-07-18 10:36:33: RF still not working Message-ID: working well- do not turn off the white AC switch From latta at snf.stanford.edu Thu Jul 19 10:33:35 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2012 10:33:35 -0700 Subject: Comment mrc SNF 2012-07-16 16:24:11: Update Message-ID: archived From latta at snf.stanford.edu Thu Jul 19 10:33:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2012 10:33:54 -0700 Subject: Comment mrc SNF 2012-07-16 12:12:18: Bad RF generator Message-ID: fixed From latta at snf.stanford.edu Thu Jul 19 10:34:28 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2012 10:34:28 -0700 Subject: Comment mrc SNF 2012-05-30 09:50:01: tested Message-ID: archived From latta at snf.stanford.edu Thu Jul 19 10:35:17 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 19 Jul 2012 10:35:17 -0700 Subject: Comment mrc SNF 2012-07-19 10:35:16: Do not turn off the white AC switch Message-ID: The repaired RF generator needs more time to warm up. From faridz at snf.stanford.edu Thu Jul 19 10:58:32 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Thu, 19 Jul 2012 10:58:32 -0700 Subject: Shutdown mrc SNF 2012-07-19 10:58:31: RF still not working. Message-ID: used Nitride recipe CHF3=15, O15, Presuure 25mtor, Power 50 Watts RF failed to trune on. From cbaxter at snf.stanford.edu Thu Jul 19 12:20:03 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 19 Jul 2012 12:20:03 -0700 Subject: Shutdown mrc SNF 2012-07-19 10:58:31: RF still not working. Message-ID: When we ran 15sccm of O2 and 15sccm of CHF3 and pressure at 25mt, I was able to tuned and strike plasma but after 1mins it de-tuned. Ran O2 only for 10mins at 100watts to clean the chamber, then re-ran the same previous recipe setting for 10 mins w/out problem. From cbaxter at snf.stanford.edu Thu Jul 19 13:15:05 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 19 Jul 2012 13:15:05 -0700 Subject: Shutdown mrc SNF 2012-07-19 13:15:05: RF generator Message-ID: Still have a problerm with the RF generator, power intermittently drop off when running longer than 5mins process. Will continue to troubleshoot further.. From latta at snf.stanford.edu Fri Jul 20 15:57:13 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 20 Jul 2012 15:57:13 -0700 Subject: Problem mrc SNF 2012-07-20 15:57:12: RF kicks off, use caution Message-ID: We are leaving the tool in problem mode instead of shutdown because some processes are working. The issue is that the RF is either not working or stopping after a few minutes. This may be due to high reflected power or over heating. Ar and O2 etches have been performed with the tool in this present state. You may have to increase the chamber pressure in order to strike the plasma. Keep the reflected power low to avoid harming the RF generator. From latta at snf.stanford.edu Fri Jul 20 15:58:28 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 20 Jul 2012 15:58:28 -0700 Subject: Shutdown mrc SNF 2012-07-19 13:15:05: RF generator Message-ID: putting into problem mode for the weekend..... From maxms at snf.stanford.edu Sun Jul 22 13:35:46 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 22 Jul 2012 13:35:46 -0700 Subject: Shutdown mrc SNF 2012-07-22 13:35:45: won't run anything Message-ID: even the argon will not run now. i won't red-light it in case someone else wants to try, but it should, in effect, be red-light. From maxms at snf.stanford.edu Sun Jul 22 13:36:01 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 22 Jul 2012 13:36:01 -0700 Subject: Comment mrc SNF 2012-07-22 13:36:01: whoops Message-ID: guess i will red-light it then... From cbaxter at snf.stanford.edu Mon Jul 23 00:13:58 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 23 Jul 2012 00:13:58 -0700 Subject: Shutdown mrc SNF 2012-07-22 13:35:45: won't run anything Message-ID: Found the source of the problem, on why RF suddenly drop off. It was the 5 torr detector ciruit, if the pressure goes above 2 torr while RF is "ON"(enable) it disable the RF(via Q401 inside the generator). The RF generator is already set up to ran at local mode and the vacuum triiger thermacouple is at 2 torr, supect the vacuun trigger thermacouple dirfted overtime, it probably at the boredline. I adjusted the vaccuum trigger pot to where when RF is on it stayed on to the duration of the process recipe. -Ran Ar only at 15sccm and pressure at 12.5mt for 30min at 50 and 100 watts- no problem. -Ran O2 at 15sccm and pressure at 25mt for 15mins at 50watts- no problem. _Ran O2 and Chf3 at 15sccm and pressure at 25mt for 15min at 50watts- no problem. -Cycled off and on AC power to the generator to make sure the vacuum trigger thermacouple does not changed pressure setting... From cbaxter at snf.stanford.edu Mon Jul 23 00:14:04 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 23 Jul 2012 00:14:04 -0700 Subject: Problem mrc SNF 2012-07-20 15:57:12: RF kicks off, use caution Message-ID: From cbaxter at snf.stanford.edu Mon Jul 23 00:52:00 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 23 Jul 2012 00:52:00 -0700 Subject: Comment mrc SNF 2012-07-23 00:52:00: Comment Message-ID: Everyone who are trained on the tool knows, when the AC power switch is just turned on there is a 3min wating period for the genrator to be ready.. From mtang at snf.stanford.edu Mon Jul 23 06:01:20 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 23 Jul 2012 06:01:20 -0700 Subject: Comment mrc SNF 2012-07-22 13:36:01: whoops Message-ID: See shutdown resolution 7/22. From mtang at snf.stanford.edu Mon Jul 23 06:06:17 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 23 Jul 2012 06:06:17 -0700 Subject: Comment mrc SNF 2012-07-23 06:06:16: RF Generator update Message-ID: Cesar ran the generator through a dummy load, using the machine controller and found the same problem where the RF kicks off after a few minutes. He checked the adjustments as per the manual. The manual describes some machine features which are used in the original Branson plasma system, but not in the MRC. .He backed off the vacuum control setting switch (not used in the MRC, but used in the Branson to ensure RF turns on onlty under vacuum.) After testing (described in 7/22 shutdown resolution), it is back over to general use. From jimkruger at snf.stanford.edu Mon Jul 23 18:30:41 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 23 Jul 2012 18:30:41 -0700 Subject: Comment mrc SNF 2012-07-23 18:30:41: Intermittant Foreline burst during roughing Message-ID: About half the time, the foreline pressure rises suddenly, 20 or 30 sec into the roughing time. Stop roughing (center switch position) ~ 10 sec, pump the foreline back below ~ 25 mTorr, then go back to roughing. High foreline pressure causes the diffusion pump to stop pumping and can diffuse oil back into the pump stack. From nxs4059 at snf.stanford.edu Tue Jul 24 16:24:08 2012 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Tue, 24 Jul 2012 16:24:08 -0700 Subject: Problem mrc SNF 2012-07-24 16:24:08: cant get power Message-ID: returned after lab shutdown to find same settings I'd left (knob positions) but no RF power. spent 45 minutes letting cool and trying to re-start but couldn't get any significant forward RF much less spark a plasma. From jimkruger at snf.stanford.edu Tue Jul 24 18:08:56 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 24 Jul 2012 18:08:56 -0700 Subject: Shutdown mrc SNF 2012-07-24 18:08:56: No RF again Message-ID: Got a minute or 2 of RF on first try with Ar, but it dropped out. I could not get any RF, even being very careful with reflected power, after that. From eenriquez at snf.stanford.edu Wed Jul 25 11:29:17 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:29:17 -0700 Subject: Shutdown mrc SNF 2012-07-24 18:08:56: No RF again Message-ID: No problem found. Ran an O2 plasma @ 200W for 1.5 hours with no problems. From eenriquez at snf.stanford.edu Wed Jul 25 11:30:12 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:30:12 -0700 Subject: Problem mrc SNF 2012-07-24 16:24:08: cant get power Message-ID: No problem found. Ran an O2 plasma @ 200W for 1.5 hours with no problems. From eenriquez at snf.stanford.edu Wed Jul 25 11:35:53 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:35:53 -0700 Subject: Problem mrc SNF 2012-07-25 11:35:52: RF generator Message-ID: Intermittent problem with the generator. So far I have not been able to duplicate the loss of power user's have reported. As a test, I will run a 5 hour long etch to see if its an overheating problem. From faridz at snf.stanford.edu Wed Jul 25 11:51:57 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Wed, 25 Jul 2012 11:51:57 -0700 Subject: Comment mrc SNF 2012-07-25 11:51:56: My Ar etch recipe works fine. Message-ID: From jimkruger at snf.stanford.edu Wed Jul 25 14:18:30 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 25 Jul 2012 14:18:30 -0700 Subject: Problem mrc SNF 2012-07-25 14:18:30: Still no RF Message-ID: From eenriquez at snf.stanford.edu Wed Jul 25 19:18:42 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Jul 2012 19:18:42 -0700 Subject: Shutdown mrc SNF 2012-07-25 19:18:42: RF generator is defective Message-ID: Just found out that only one of the two suspected bad power tubes were replaced because the other tube was not in stock. We will decide in the morning whether we want to repair this generator or try and install a more modern generator. From latta at snf.stanford.edu Fri Jul 27 15:10:37 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 27 Jul 2012 15:10:37 -0700 Subject: Comment mrc SNF 2012-07-27 15:10:37: Qual after new RF generator installed Message-ID: Ar sputter etch, 10 min, 100W, 690-700Vp Etch rate = 17A/min Last ER = 21A/min @700Vp The RF generator needs safety innterlocks installed before we release the tool. Parts have been ordered and we hope to hac=ve them installed by early/mid next week. From jimkruger at snf.stanford.edu Tue Jul 31 17:05:24 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 31 Jul 2012 17:05:24 -0700 Subject: Problem mrc SNF 2012-07-31 17:05:23: Foreline pressure burst during roughing Message-ID: Everytime I pump down the chamber, a rapid pressure rise in trhe forline occurs. This is not my failure to wait long enough with the pump-down switch, it happens at the "halfway pumped" pressure. I speculate that it is the "unloading" of the gate valve opening a leak. Perhaps a new O-ring on the gate valve?