Comment mrc SNF 2012-07-11 10:33:53: Ar qual run- after rf repair

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Jul 11 10:33:54 PDT 2012


Ar = 15sccm, 12.5mT, 10 min.
Power set to 105W, Vp = 660V, ER = 20.3A/min
No quartz plate, SNF ring used.




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