Shutdown mrc SNF 2012-07-19 10:58:31: RF still not working.

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Jul 19 12:20:03 PDT 2012


When we ran 15sccm of O2 and 15sccm of CHF3 and pressure
at 25mt,  I was able to tuned and strike plasma  but after 1mins it 
de-tuned. Ran O2 only for 10mins at 100watts to clean the chamber,
then re-ran the same previous recipe setting for 10 mins w/out 
problem.




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