Problem mrc SNF 2012-07-20 15:57:12: RF kicks off, use caution

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Jul 20 15:57:13 PDT 2012


We are leaving the tool in problem mode instead of shutdown because some processes are working.  The issue is that the RF is either not working or stopping after a few minutes.  This may be due to high reflected power or over heating.
Ar and O2 etches have been performed with the tool in this present state.  
You may have to increase the chamber pressure in order to strike the plasma.
Keep the reflected power low to avoid harming the RF generator.




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