Comment mrc SNF 2012-07-23 18:30:41: Intermittant Foreline burst during roughing
jimkruger at snf.stanford.edu
jimkruger at snf.stanford.edu
Mon Jul 23 18:30:41 PDT 2012
About half the time, the foreline pressure rises suddenly, 20 or 30 sec into the roughing time. Stop roughing (center switch position) ~ 10 sec, pump the foreline back below ~ 25 mTorr, then go back to roughing.
High foreline pressure causes the diffusion pump to stop pumping and can diffuse oil back into the pump stack.
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