Problem mrc SNF 2012-07-25 14:18:30: Still no RF
jimkruger at snf.stanford.edu
jimkruger at snf.stanford.edu
Wed Jul 25 14:18:30 PDT 2012
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Comment mrc SNF 2012-07-25 11:51:56: My Ar etch recipe works fine.
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Shutdown mrc SNF 2012-07-25 19:18:42: RF generator is defective
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Comment mrc SNF 2012-07-25 11:51:56: My Ar etch recipe works fine.
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Shutdown mrc SNF 2012-07-25 19:18:42: RF generator is defective
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