Comment mrc SNF 2012-07-27 15:10:37: Qual after new RF generator installed

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Jul 27 15:10:37 PDT 2012


Ar sputter etch, 10 min, 100W, 690-700Vp
Etch rate = 17A/min
Last ER = 21A/min @700Vp
The RF generator needs safety innterlocks installed before we release the tool.  Parts have been ordered and we hope to hac=ve them installed by early/mid next week.




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