From haiwei at snf.stanford.edu Sun Jun 3 15:18:26 2012 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sun, 3 Jun 2012 15:18:26 -0700 Subject: Problem mrc SNF 2012-06-03 15:18:25: Unstable chamber pressure Message-ID: the pressure sometimes jumps around randomly during the etching. From eenriquez at snf.stanford.edu Mon Jun 4 08:04:08 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Jun 2012 08:04:08 -0700 Subject: Problem mrc SNF 2012-06-03 15:18:25: Unstable chamber pressure Message-ID: No problem found. Ran an O2 plasma for 15 minutes. The pressure deviated +/- 1 mT. From eenriquez at snf.stanford.edu Tue Jun 5 10:07:30 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Jun 2012 10:07:30 -0700 Subject: Comment mrc SNF 2012-06-05 10:07:30: Completed monthly PM Message-ID: Cleaned the chamber, added oil to diffusion pump. From latta at snf.stanford.edu Fri Jun 8 17:00:36 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 8 Jun 2012 17:00:36 -0700 Subject: Comment mrc SNF 2012-06-08 17:00:35: Std Ar recipe test Message-ID: Ar = 15sccm, 12.5mT, 10 min. Power set to 100W, Vp = 620-660V, ER = 25.0A/min No quartz plate, SNF ring used. From latta at snf.stanford.edu Tue Jun 12 12:02:53 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 12 Jun 2012 12:02:53 -0700 Subject: Comment mrc SNF 2012-06-12 12:02:52: base pressure not less than 2.5mT Message-ID: Diff pump temp ok. From jimkruger at snf.stanford.edu Tue Jun 26 14:46:01 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 26 Jun 2012 14:46:01 -0700 Subject: Problem mrc SNF 2012-06-26 14:46:00: Foreline TC gauge appears contaminated Message-ID: In standby, the Foreline TC gauge is reading 65 mTorr while the Rough TC is 25. This may be a sign that the gauge is contaminated.