Problem mrc SNF 2012-03-29 12:10:32: oxygen etching gold

maxms at snf.stanford.edu maxms at snf.stanford.edu
Thu Mar 29 12:10:32 PDT 2012


I've measured an etch rate of at least 4nm/min of the oxygen for just blank gold wafer.  I also see it clearly etching the silicon.  this should not be happening...




More information about the mrc-pcs mailing list