From latta at snf.stanford.edu Wed May 16 16:27:27 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 16 May 2012 16:27:27 -0700 Subject: Problem mrc SNF 2012-05-16 16:27:26: Etch rates for Ar sputter etching are low Message-ID: Recent reports that the standard Ar sputter etch recipe (Ar = 15, 100W, 12.5mT) has decreased etch rates; thermal ox was ~24, now ~8A/min. From jhaydon at snf.stanford.edu Thu May 17 07:26:27 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 17 May 2012 07:26:27 -0700 Subject: Comment mrc SNF 2012-05-17 07:26:26: chiller Message-ID: Drained the chiller and re filled From latta at snf.stanford.edu Thu May 17 17:01:43 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 May 2012 17:01:43 -0700 Subject: Comment mrc SNF 2012-04-04 10:35:12: Ar recipe check Message-ID: newer tests posted From latta at snf.stanford.edu Thu May 17 17:02:43 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 May 2012 17:02:43 -0700 Subject: Problem mrc SNF 2012-05-16 16:27:26: Etch rates for Ar sputter etching are low Message-ID: chiller water replced and test run looking at Vp. Posted as comment. From latta at snf.stanford.edu Thu May 17 17:06:01 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 May 2012 17:06:01 -0700 Subject: Comment mrc SNF 2012-05-17 17:06:00: Std Ar recipe tests Message-ID: Two tests completed- 1) Power set to 100W, Vp = 610V, ER = 21.4A/min 2 Vp set to 660V, 105-107W, ER = 23.3A/mn No quartz plate, SNF ring used. From gyama at snf.stanford.edu Fri May 18 08:31:40 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 18 May 2012 08:31:40 -0700 Subject: Comment mrc SNF 2012-05-18 08:31:39: cannot get refl. below 13W Message-ID: using same parameters that Nancy used for her qual From sam at snf.stanford.edu Fri May 18 14:14:07 2012 From: sam at snf.stanford.edu (sam at snf.stanford.edu) Date: Fri, 18 May 2012 14:14:07 -0700 Subject: Shutdown mrc SNF 2012-05-18 14:14:06: Pumping Down Issue Message-ID: The base pressure can not go below 25 mTorr and Rough also can't go below 300 mTorr From cbaxter at snf.stanford.edu Fri May 18 14:28:52 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 18 May 2012 14:28:52 -0700 Subject: Shutdown mrc SNF 2012-05-18 14:14:06: Pumping Down Issue Message-ID: Found the vent valve was not close (partly open), close vent valve and was able to pump chamber is 0.5mt.. From latta at snf.stanford.edu Fri May 18 15:46:05 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 18 May 2012 15:46:05 -0700 Subject: Comment mrc SNF 2012-05-18 08:31:39: cannot get refl. below 13W Message-ID: Showed Gary what I did and after a tiny misstep he is good to go.... From sam at snf.stanford.edu Tue May 22 19:20:58 2012 From: sam at snf.stanford.edu (sam at snf.stanford.edu) Date: Tue, 22 May 2012 19:20:58 -0700 Subject: Comment mrc SNF 2012-05-22 19:20:57: Standby Mode Message-ID: Previous user did not left the machine in proper standby-mode. From jasonlin at snf.stanford.edu Mon May 28 18:38:45 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Mon, 28 May 2012 18:38:45 -0700 Subject: Problem mrc SNF 2012-05-28 18:38:45: Cannot vent chamber Message-ID: From maxms at snf.stanford.edu Mon May 28 22:58:35 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Mon, 28 May 2012 22:58:35 -0700 Subject: Comment mrc SNF 2012-05-28 22:58:35: venting fine Message-ID: not sure what the issue was... but when the chamber is isolated from the pumps, as it should be for venting, the venting is fine. check that it is in foreline and that the pump is turned all the way clockwise next time if it cant vent. From eenriquez at snf.stanford.edu Tue May 29 07:07:27 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 May 2012 07:07:27 -0700 Subject: Problem mrc SNF 2012-05-28 18:38:45: Cannot vent chamber Message-ID: No problem found. From calarrudo at snf.stanford.edu Tue May 29 17:15:18 2012 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 29 May 2012 17:15:18 -0700 Subject: Problem mrc SNF 2012-05-29 17:15:17: Message-ID: Previous user left gate valve and monometer open when the system was shutdown could not vent chamber until gate valve and manometer were closed. From mdickey at snf.stanford.edu Wed May 30 09:50:02 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 30 May 2012 09:50:02 -0700 Subject: Comment mrc SNF 2012-05-30 09:50:01: tested Message-ID: Nancy and I tested the system with Argon and it appears to be functioning normally From latta at snf.stanford.edu Wed May 30 10:27:53 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 May 2012 10:27:53 -0700 Subject: Comment mrc SNF 2012-05-17 07:26:26: chiller Message-ID: noted From latta at snf.stanford.edu Wed May 30 10:31:26 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 May 2012 10:31:26 -0700 Subject: Comment mrc SNF 2012-05-22 19:20:57: Standby Mode Message-ID: noted From latta at snf.stanford.edu Wed May 30 10:31:47 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 May 2012 10:31:47 -0700 Subject: Comment mrc SNF 2012-05-28 22:58:35: venting fine Message-ID: noted From latta at snf.stanford.edu Wed May 30 10:33:33 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 May 2012 10:33:33 -0700 Subject: Problem mrc SNF 2012-05-29 17:15:17: Message-ID: system checkedout- running well. From latta at snf.stanford.edu Wed May 30 13:19:31 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 May 2012 13:19:31 -0700 Subject: Comment mrc SNF 2012-05-30 13:19:31: Std Ar recipe test Message-ID: Ar = 15sccm, 12.5mT, 10 min. Power set to 100W, Vp = 650V, ER = 16.7A/min Quartz plate, SNF ring used. From latta at snf.stanford.edu Thu May 31 11:41:42 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 31 May 2012 11:41:42 -0700 Subject: Comment mrc SNF 2012-05-31 11:41:41: Std Ar recipe test, pt 2 Message-ID: Ar = 15sccm, 12.5mT, 10 min. Power set to 100W, Vp = 660V, ER = 22.0A/min No quartz plate, SNF ring used.