Problem mrc SNF 2012-05-16 16:27:26: Etch rates for Ar sputter etching are low

latta at snf.stanford.edu latta at snf.stanford.edu
Wed May 16 16:27:27 PDT 2012


Recent reports that the standard Ar sputter etch recipe (Ar = 15, 100W, 12.5mT) has decreased etch rates; thermal ox was ~24, now ~8A/min.




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