Comment mrc SNF 2012-05-30 13:19:31: Std Ar recipe test

latta at snf.stanford.edu latta at snf.stanford.edu
Wed May 30 13:19:31 PDT 2012


Ar = 15sccm, 12.5mT, 10 min.
Power set to 100W, Vp = 650V, ER = 16.7A/min
Quartz plate, SNF ring used.




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