Comment mrc SNF 2012-05-31 11:41:41: Std Ar recipe test, pt 2

latta at snf.stanford.edu latta at snf.stanford.edu
Thu May 31 11:41:42 PDT 2012


Ar = 15sccm, 12.5mT, 10 min.
Power set to 100W, Vp = 660V, ER = 22.0A/min
No quartz plate, SNF ring used.




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